Takanori Nakaike
Komatsu Limited
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Publication
Featured researches published by Takanori Nakaike.
Proceedings of SPIE, the International Society for Optical Engineering | 2006
Satoshi Tanaka; Hiroaki Tsushima; Takanori Nakaike; Taku Yamazaki; Takashi Saito; Hitoshi Tomaru; Koji Kakizaki; Takashi Matsunaga; Toru Suzuki; Osamu Wakabayashi; Shinji Nagai; Junichi Fujimoto; Toyoharu Inoue; Hakaru Mizoguchi
Last year Gigaphoton introduced a 45-W ArF excimer laser, model GT40A, to semiconductor markets as a light source for 65 nm lithography generation. The GT40A is based on injection lock technology with G-electrode, magnetic bearing and high resolution technologies for high reliability and long lifetime. As a result, GT40A showed the stable performance during the chamber maintenance interval of over 15 billion pulses. In this paper we will report the longterm stability of GT40A.
Archive | 1999
Osamu Wakabayashi; Takanori Nakaike
Proceedings of SPIE, the International Society for Optical Engineering | 2006
Hakaru Mizoguchi; Toyoharu Inoue; Junichi Fujimoto; Toru Suzuki; Takashi Matsunaga; S. Sakanishi; M. Kaminishi; Yukio Watanabe; Takanori Nakaike; M. Shinbori; Masaya Yoshino; T. Kawasuji; H. Nogawa; Hiroshi Umeda; H. Taniguchi; Youichi Sasaki; J. Kinoshita; Tamotsu Abe; Hirokazu Tanaka; Hideyuki Hayashi; Kenichi Miyao; M. Niwano; Akihiko Kurosu; Masanori Yashiro; Hitoshi Nagano; T. Igarashi; Toshio Mimura; Kouji Kakizaki
Archive | 2001
Satoru Busshida; Takanori Nakaike; Toru Suzuki; 孝昇 中池; 了 仏帥田; 徹 鈴木
Archive | 2005
Satoru Busshida; Takanori Nakaike; Toru Suzuki; 孝昇 中池; 了 仏帥田; 徹 鈴木
Archive | 1997
Manabu Ando; Masato Moriya; Takanori Nakaike; Eri Suda; Hideyuki Wakai; 孝昇 中池; 正人 守屋; 学 安藤; 秀之 若井; 江利 須田
Archive | 2011
Tatsuya Ariga; Takahito Kumazaki; Shinji Nagai; Takanori Nakaike; Osamu Wakabayashi; 孝昇 中池; 達也 有我; 伸治 永井; 貴仁 熊崎; 理 若林
SPIE's 27th Annual International Symposium on Microlithography | 2002
Takanori Nakaike; Osamu Wakabayashi; Toru Suzuki; Hakaru Mizoguchi; Kiyoharu Nakao; Ryoichi Nohdomi; Tatsuya Ariga; Naoki Kitatochi; Takashi Suganuma; Takahito Kumazaki; Kazuaki Hotta; Masaki Yoshioka
Archive | 1999
Osamu Wakabayashi; Takanori Nakaike
Storage and Retrieval for Image and Video Databases | 2001
Osamu Wakabayashi; Jun Sakuma; Toru Suzuki; Hirokazu Kubo; Naoki Kitatochi; Takashi Suganuma; Takanori Nakaike; Takahito Kumazaki; Kazuaki Hotta; Hakaru Mizoguchi; Kiyoharu Nakao; Tadashi Togashi; Yasuo Nabekawa; Shuntaro Watanabe
