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Takashi Shigeoka

Tokyo Electron

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Publication

Featured researches published by Takashi Shigeoka.

Archive | 2002

Gaseous raw material supply system for thin film forming apparatus and thin film forming apparatus

Tadahiro Ishizaka; Hiroshi Kawanami; Yasuhiko Kojima; Yasuhiro Oshima; Takashi Shigeoka; 大島 康弘; 小島 康彦; 河南 博; 石坂 忠大; 重岡 隆

Archive | 2001

Heat treatment apparatus having a thin light-transmitting window

Shouqian Shao; Yicheng Li; Takashi Shigeoka; Takeshi Sakuma

Archive | 2000

Temperature measuring method, temperature control method and processing apparatus

Takashi Shigeoka; Takeshi Sakuma

Archive | 2001

Thermal processing system

Takeshi Sakuma; Takashi Shigeoka; Yicheng Li

Archive | 2001

Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment

Takashi Shigeoka; Takeshi Sakuma

Archive | 2005

Thin-film formation in semiconductor device fabrication process and film deposition apparatus

Tadahiro Ishizaka; Yasuhiro Oshima; Takashi Shigeoka; Kohei Kawamura; Yukio Fukuda; Yasuhiko Kojima

Archive | 2002

Temperature measuring method, heat treating device and method, computer program, and radiation thermometer

Takashi Shigeoka

Archive | 2001

Lamp having a high-reflectance film for improving directivity of light and heat treatment apparatus having such a lamp

Takashi Shigeoka

Archive | 2000

Virtual blackbody radiation system and radiation temperature measuring system

Eisuke Morisaki; Masayuki Kitamura; Nobuaki Takahashi; Takashi Shigeoka

Archive | 2001

Thermal process apparatus for a semiconductor substrate

Yicheng Li; Takashi Shigeoka; Takeshi Sakuma

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Collaboration

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Tadahiro Ishizaka

Tokyo Electron

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Yasuhiko Kojima

Tokyo Electron

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Yasuhiro Oshima

Epson

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Takeshi Sakuma

Tokyo Electron

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Hiroshi Kannan

Tokyo Electron

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Kohei Kawamura

Tokyo Electron

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Yukio Fukuda

Texas Instruments

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Eisuke Morisaki

Tokyo Electron

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Hiroaki Yokoi

Tokyo Electron

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Masayuki Kitamura

Tokyo Electron

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