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Masayuki Kitamura

Tokyo Electron

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Publication

Featured researches published by Masayuki Kitamura.

Archive | 1996

One-by-one type heat-processing apparatus

Junichi Arami; Kenji Ishikawa; Masayuki Kitamura

Archive | 1995

Method of forming a bonding portion

Makoto Aoki; Mitsuaki Komino; Masayuki Kitamura

Archive | 1995

Vacuum exhaust system for processing apparatus

Junichi Arami; Masayuki Kitamura; Mitsuaki Komino

Archive | 2001

Quartz window having reinforcing ribs

Masayuki Kitamura

Archive | 2000

Thermal processing unit and thermal processing method

Masayuki Kitamura; Tomohiro Shiotani; Isao Tafusa

Archive | 2000

Thermal treatment method and apparatus

Yasushi Yagi; Takeshi Sakuma; Wataru Okase; Masayuki Kitamura; Hironori Yagi; Eisuke Morisaki

Archive | 2006

Plasma processing apparatus and method therefor

Masaki Hirayama; Masayuki Kitamura; Tadahiro Omi; 昌幸 北村; 忠弘 大見; 昌樹 平山

Archive | 1995

Leaf-type heat treating system

Jiyunichi Arami; Kenji Ishikawa; Masayuki Kitamura; 昌幸 北村; 賢治 石川; 淳一 荒見

Archive | 1998

Single-substrate-processing apparatus in semiconductor processing system

Masayuki Kitamura; Harunori Ushikawa

Archive | 1994

Treatment device and coating of aluminum-based member

Masayuki Kitamura; Mitsuaki Komino; 昌幸 北村; 光明 小美野

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Eisuke Morisaki

Tokyo Electron

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Kenji Ishikawa

Shin-Etsu Chemical

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Mitsuaki Komino

Tokyo Electron

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Isao Tafusa

Tokyo Electron

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Junichi Arami

Tokyo Electron

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Masaki Hirayama

Canon Inc.

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Nobuaki Takahashi

Tokyo Electron

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Takashi Shigeoka

Tokyo Electron

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Tomohiro Shiotani

Tokyo Electron

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Harunori Ushikawa

Tokyo Electron

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