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Dive into the research topics where Takenobu Matsuo is active.

Publication


Featured researches published by Takenobu Matsuo.


Archive | 1998

Method and device for treating substrate

Takenobu Matsuo; Tsuyoshi Wakabayashi; Teruyuki Hayashi; Misako Saito


Archive | 1995

Resist processing apparatus for a rectangular substrate

Kiyohisa Tateyama; Kimio Motoda; Tatsuya Iwasaki; Takenobu Matsuo; Kazuki Denpoh; Eiji Yamaguchi


Archive | 1993

Processing apparatus and flow control arrangement therefor

Shuji Moriya; Takenobu Matsuo; Tsuyoshi Wakabayashi


Archive | 2003

Air cleaning apparatus

Takashi Tanahashi; Syuji Moriya; Tsuyoshi Wakabayashi; Takenobu Matsuo


Archive | 1994

Processing apparatus using gas

Shuji Moriya; Takenobu Matsuo; Tsuyoshi Wakabayashi; Kazutoshi Miura; Takahiro Mori


Archive | 2001

Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator

Osamu Suenaga; Wataru Okase; Takenobu Matsuo


Archive | 1994

Heat treating method and device

Eiji Yamaguchi; Kaoru Fujihara; Takenobu Matsuo; Hirofumi Kitayama


Archive | 1993

Flow control apparatus

Takenobu Matsuo; Tsuyoshi Wakabayashi; Shuji Moriya


Archive | 1998

Electronic/electric components used in clean room and substrate treatment apparatus

Takenobu Matsuo; Tsuyoshi Wakabayashi; Misako Saito; Sadao Kobayashi; Yoshihide Wakayama; Masayuki Imafuku


Archive | 2001

Liquid treatment system and liquid treatment method

Satoshi Nakashima; Wataru Okase; Takenobu Matsuo; Tameyasu Hyakuzuka; Yasushi Yagi; Yoshiyuki Harima; Jun Yamauchi; Hiroki Taniyama; Kyungho Park; Yoshitsugu Tanaka; Yoshinori Kato; Hiroshi Sato

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