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Kazuki Denpoh

Tokyo Electron

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Publication

Featured researches published by Kazuki Denpoh.

Archive | 2001

Apparatus and method for plasma treatment

Kazuki Denpoh

Archive | 2004

Plasma processing apparatus, focus ring, and susceptor

Shosuke Endoh; Noriyuki Iwabuchi; Shigeaki Kato; Tomoya Okubo; Jun Hirose; Koichi Nagakura; Chishio Koshimizu; Kazuki Denpoh

Archive | 1995

Resist processing apparatus for a rectangular substrate

Kiyohisa Tateyama; Kimio Motoda; Tatsuya Iwasaki; Takenobu Matsuo; Kazuki Denpoh; Eiji Yamaguchi

Archive | 2008

Hollow cathode device and method for using the device to control the uniformity of a plasma process

Kazuki Denpoh; Peter L. G. Ventzek; Lin Xu; Lee Chen

Archive | 2008

METHOD OF PLASMA PARTICLE SIMULATION, STORAGE MEDIUM, PLASMA PARTICLE SIMULATOR AND PLASMA PROCESSING APPARATUS

Kazuki Denpoh

Archive | 2006

Electron temperature measurement method, electron temperature measurement program for implementing the method, and storage medium storing the electron temperature measurement program

Kazuki Denpoh

Archive | 1997

Resist processing method and apparatus

Kiyohisa Tateyama; Kimio Motoda; Tatsuya Iwasaki; Takenobu Matsuo; Kazuki Denpoh; Eiji Yamaguchi

Archive | 2012

Plasma processing apparatus and plasma control method

Chishio Koshimizu; Kazuki Denpoh

Archive | 2009

FOCUS RING, SUBSTRATE MOUNTING TABLE AND PLASMA PROCESSING APPARATUS HAVING SAME

Masaaki Miyagawa; Katsuhiko Ono; Chishio Koshimizu; Kazuki Denpoh; Tatsuo Matsudo; Yasuhiro Hamada

Archive | 2008

Shower plate and substrate processing apparatus

Chishio Koshimizu; Kazuki Denpoh; Hiromasa Mochiki

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Collaboration

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Chishio Koshimizu

Wakayama University

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Eiji Yamaguchi

Tokyo Electron

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Kimio Motoda

Tokyo Electron

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Kiyohisa Tateyama

Tokyo Electron

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Takenobu Matsuo

Tokyo Electron

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Tatsuya Iwasaki

Tokyo Electron

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Hiromasa Mochiki

Tokyo Electron

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Jun Hirose

Tokyo Electron

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Katsuhiko Ono

Tokyo Electron

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Koichi Nagakura

Tokyo Electron

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