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Kimio Motoda

Tokyo Electron

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Publication

Featured researches published by Kimio Motoda.

Archive | 1999

Coating method and apparatus for semiconductor process

Kiyohisa Tateyama; Kimio Motoda; Noriyuki Anai

Archive | 1995

Resist processing apparatus for a rectangular substrate

Kiyohisa Tateyama; Kimio Motoda; Tatsuya Iwasaki; Takenobu Matsuo; Kazuki Denpoh; Eiji Yamaguchi

Archive | 1995

Coating apparatus therefor

Kimio Motoda; Kiyohisa Tateyama

Archive | 1995

Method of forming a coating film

Kiyohisa Tateyama; Kimio Motoda; Kenji Sekiguchi; Tsutae Omori

Archive | 1996

Apparatus for coating resist on substrate

Kimio Motoda; Kiyohisa Tateyama; Noriyuki Anai

Archive | 1996

Method of forming a coating film and coating apparatus

Kiyohisa Tateyama; Kimio Motoda; Kenji Sekiguchi; Tsutae Omori

Archive | 1997

Apparatus for forming coating film for semiconductor processing

Kimio Motoda; Tetsu Kawasaki

Archive | 1997

Method and apparatus for processing substrates

Tetsu Kawasaki; Kimio Motoda

Archive | 1997

Apparatus for treating a substrate with resist and resist-treating method

Kimio Motoda; Kiyomitsu Yamaguchi; Yoshitaka Matsuda; Tetsu Kawasaki

Archive | 2006

Floating-type substrate conveying and processing apparatus

Tsuyoshi Yamasaki; Toshifumi Inamasu; Kenya Shinozaki; Kimio Motoda

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Collaboration

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Kiyohisa Tateyama

Tokyo Electron

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Tatsuya Iwasaki

Tokyo Electron

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Yoshiharu Ota

Tokyo Electron

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Yoshitaka Matsuda

Tokyo Electron

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Tetsu Kawasaki

Tokyo Electron

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Atsushi Yamashita

Tokyo Electron

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Eiji Yamaguchi

Tokyo Electron

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Kazuki Denpoh

Tokyo Electron

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Kenji Sekiguchi

Tokyo Electron

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Kenya Shinozaki

Tokyo Electron

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