Takenori Hiroki

Proposal for new atomic force microscopy (AFM) imaging for a high aspect structure (digital probing mode AFM)

A new imaging technique of digital probing method in atomic force microscopy (AFM) is proposed for the evaluation of high aspect structures. This method independently controls the probe in either xy- or z-directional movement to remove torsion of the probe. The xy-movement only takes place when the probe is separated from the sample surface. During the approach of the probe to the surface the xy-movement is stopped. This method allows to image the dry-etched grooves faithfully. Compared with cross-section SEM observation with cracking of the sample, it is demonstrated that this method is advantageous for the evaluation of the cross-section because of the short measurement time and easy operation.