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Dive into the research topics where Taketo Ueno is active.

Publication


Featured researches published by Taketo Ueno.


Archive | 2011

Method and apparatus for inspecting defect

Shunichi Matsumoto; Taketo Ueno; Atsushi Taniguchi


Archive | 2005

Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device

Minori Noguchi; Masahiko Nakada; Takahiko Suzuki; Taketo Ueno; Toshihiko Nakata; Shunji Maeda


Archive | 2011

Method of apparatus for detecting particles on a specimen

Akira Hamamatsu; Minori Noguchi; Yoshimasa Ohshima; Sachio Uto; Taketo Ueno; Hiroyuki Nakano; Takahiro Jingu; Hisashi Hatano; Yukihisa Mohara; Seiji Otani; Takahiro Togashi


Archive | 2004

Foreign matter inspection method and device therefor

Rei Hamamatsu; Hiroshi Hatano; Takahiro Jingu; Yasunaga Mobara; Hiroyuki Nakano; Minoru Noguchi; Yoshimasa Oshima; Seiji Otani; Takahiro Togashi; Taketo Ueno; Yukio Uto; 剛渡 上野; 博之 中野; 良正 大島; 清ニ 大谷; 幸雄 宇都; 孝裕 富樫; 央 波多野; 玲 浜松; 孝広 神宮; 廉永 茂原; 稔 野口


Archive | 2007

Method and apparatus for detecting defect

Toshihiko Nakada; Hiroyuki Nakano; Taketo Ueno; Yasuhiro Yoshitake; 剛渡 上野; 俊彦 中田; 博之 中野; 康裕 吉武


Archive | 2010

METHOD OF DEFECT INSPECTION AND DEVICE OF DEFECT INSPECTION

Yukihiro Shibata; Toshihiko Nakata; Taketo Ueno; Atsushi Taniguchi; Toshifumi Honda


Archive | 2002

Apparatus and method for measuring matching accuracy and method and system for manufacturing semiconductor device

Shunji Maeda; Masahiko Nakada; Toshihiko Nakada; Minoru Noguchi; Takahiko Suzuki; Taketo Ueno; 剛渡 上野; 俊彦 中田; 匡彦 中田; 俊二 前田; 稔 野口; 高彦 鈴木


Archive | 2010

DARK-FIELD DEFECT INSPECTING METHOD, DARK-FIELD DEFECT INSPECTING APPARATUS, ABERRATION ANALYZING METHOD, AND ABERRATION ANALYZING APPARATUS

Atsushi Taniguchi; Taketo Ueno; Yukihiro Shibata; Shunji Maeda; Tetsuya Matsui


Archive | 2011

Defect inspecting apparatus and defect inspecting method

Atsushi Taniguchi; Yukihiro Shibata; Taketo Ueno; Shunichi Matsumoto


Archive | 2008

Method and apparatus for inspecting a semiconductor device

Taketo Ueno; Yasuhiro Yoshitake

Collaboration


Dive into the Taketo Ueno's collaboration.

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