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Dive into the research topics where Yukihiro Shibata is active.

Publication


Featured researches published by Yukihiro Shibata.


Archive | 2009

Defect inspection method and apparatus

Shunji Maeda; Kenji Oka; Yukihiro Shibata; Minoru Yoshida; Chie Shishido; Yuji Takagi; Atsushi Yoshida; Kazuo Yamaguchi


Archive | 2004

Defect inspection method and apparatus therefor

Shunji Maeda; Atsushi Yoshida; Yukihiro Shibata; Minoru Yoshida; Sachio Uto; Hiroaki Shishido; Toshihiko Nakata


Archive | 2009

Method and apparatus for inspecting defects

Yukihiro Shibata; Shunji Maeda


Archive | 2004

Method of inspecting defects

Takafumi Okabe; Shunji Maeda; Yukihiro Shibata; Hidetoshi Nishiyama


Archive | 2012

Defect inspection method and defect inspection device

Shunichi Matsumoto; Atsushi Taniguchi; Toshifumi Honda; Yukihiro Shibata; Yuta Urano


Archive | 2004

Method and Apparatus for Observing and Inspecting Defects

Yukihiro Shibata; Shunji Maeda; Kazuo Yamaguchi; Minoru Yoshida; Atsushi Yoshida; Kenji Oka; Kenji Watanabe


Archive | 2000

Method and apparatus for inspecting defects in a patterned specimen

Shunji Maeda; Atsushi Yoshida; Yukihiro Shibata; Toshihiko Nakata; Hiroaki Shishido; Minoru Yoshida; Sachio Uto


Archive | 2000

Method and device for inspecting pattern defect

Shunji Maeda; Toshihiko Nakada; Yukihiro Shibata; Hiroaki Shishido; Yukio Uto; Atsushi Yoshida; Minoru Yoshida; 俊彦 中田; 俊二 前田; 敦志 吉田; 幸雄 宇都; 弘明 宍戸; 行広 芝田


Archive | 1999

Method and apparatus for inspection of defect

Shunji Maeda; Kenji Oka; Yukihiro Shibata; Minoru Yoshida; 俊二 前田; 実 吉田; 健次 岡; 行広 芝田


Archive | 1993

Illumination method, illumination apparatus and projection exposure apparatus

Yoshitada Oshida; Tutomu Tawa; Yukihiro Shibata; Shigemi Ishii; Minori Noguchi; Tsuneo Terasawa; Makoto Murayama

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