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Takuro Kosaka

Shin-Etsu Chemical

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Publication

Featured researches published by Takuro Kosaka.

Archive | 2014

Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method

Yukio Inazuki; Toyohisa Sakurada; Hideo Kaneko; Takuro Kosaka; Kouhei Sasamoto

Archive | 2017

Halftone phase shift photomask blank and making method

Takuro Kosaka; Yukio Inazuki; Hideo Kaneko; Toyohisa Sakurada

Archive | 2016

METHOD FOR PREPARING HALFTONE PHASE SHIFT PHOTOMASK BLANK

Takuro Kosaka; Yukio Inazuki

Archive | 2014

CONTAINER FOR STORING PHOTOMASK BLANKS

Tsutomu Suzuki; Shinichi Ohori; Ryuji Koitabashi; Hideo Nakagawa; Takuro Kosaka; Takahiro Kishita; Hiroshi Fukuda

Archive | 2017

HALFTONE PHASE SHIFT PHOTOMASK BLANK, MAKING METHOD, AND HALFTONE PHASE SHIFT PHOTOMASK

Takuro Kosaka

Archive | 2016

Phase shift mask blank, phase shift mask, and blank preparing method

Yukio Inazuki; Takuro Kosaka

Archive | 2016

Binary photomask blank, preparation thereof, and preparation of binary photomask

Yukio Inazuki; Takuro Kosaka; Kazuhiro Nishikawa

Archive | 2016

Rohling für halbton-phasenschiebermaske und halbton-phasenschiebermaske

Kouhei Sasamoto; Takuro Kosaka; Yukio Inazuki; Hideo Kaneko

Archive | 2016

Verfahren zur herstellung von halbtonphasenverschieber-fotomaskenrohlingen

Takuro Kosaka; Yukio Inazuki

Archive | 2016

Ébauche de masque de déphasage à tramage et un tel masque

Kouhei Sasamoto; Takuro Kosaka; Yukio Inazuki; Hideo Kaneko

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Collaboration

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Hideo Kaneko

Sumitomo Chemical

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Yukio Inazuki

East Tennessee State University

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Yukio Inazuki

East Tennessee State University

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Toyohisa Sakurada

Shin-Etsu Chemical

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Kouhei Sasamoto

Shin-Etsu Chemical

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Hideo Nakagawa

Shin-Etsu Chemical

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Hiroshi Fukuda

Shin-Etsu Chemical

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Kazuhiro Nishikawa

Shin-Etsu Chemical

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Ryuji Koitabashi

Shin-Etsu Chemical

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Shinichi Ohori

Shin-Etsu Chemical

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