Tarun Mudgal
Rochester Institute of Technology
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Publication
Featured researches published by Tarun Mudgal.
229th ECS Meeting (May 29 - June 2, 2016) | 2016
Tarun Mudgal; Nicholas Edwards; Prashant Ganesh; Anish Bharadwaj; Robert G. Manley; Karl D. Hirschman
A study of the influence of back-channel alumina passivation on the operation of bottom-gate IGZO TFTs is presented. TFTs without any passivation material deposited typically exhibit best-case initial results. Regardless a passivation layer is required for device stability and process integration. The impact of passivation using alumina deposited via electron beam evaporation and atomic layer deposition (ALD) has been investigated. A decrease in subthreshold slope and channel mobility on certain treatment combinations is attributed to an inferior IGZO/alumina back-channel interface. A two-step passivation process has been developed which offers back-channel protection during device fabrication, and remains compatible with an oxidizing ambient anneal. Modifications in the passivation and annealing procedures and process integration details have resulted in a marked improvement in the performance of alumina passivated devices, with demonstrated resistance to aging.
225th ECS Meeting (May 11-15, 2014) | 2014
Tarun Mudgal; Nathaniel Walsh; Robert G. Manley; Karl D. Hirschman
MRS Proceedings | 2012
Qinglong Li; Tarun Mudgal; Patricia Meller; Seth Slavin; Robert G. Manley; Karl D. Hirschman
MRS Proceedings | 2014
Tarun Mudgal; C. Reepmeyer; R.G. Manley; Denis Cormier; Karl D. Hirschman
MRS Proceedings | 2014
Tarun Mudgal; N. Walsh; R.G. Manley; Karl D. Hirschman
2014 ECS and SMEQ Joint International Meeting (October 5-9, 2014) | 2014
Tarun Mudgal; Nathaniel Walsh; Nicholas Edwards; Robert G. Manley; Karl D. Hirschman
ECS Transactions | 2018
Karl D. Hirschman; Tarun Mudgal; Eli Powell; Robert G. Manley
ECS Journal of Solid State Science and Technology | 2017
Tarun Mudgal; K. Bhadrachalam; P. Bischoff; D. Cormier; R. G. Manley; Karl D. Hirschman
231st ECS Meeting (May 28 - June 1, 2017) | 2017
Tarun Mudgal; Anish Bharadwaj; Prashant Ganesh; Eli Powell; Robert G. Manley; Karl D. Hirschman
PRiME 2016/230th ECS Meeting (October 2-7, 2016) | 2016
Tarun Mudgal; Nicholas Edwards; Prashant Ganesh; Anish Bharadwaj; Eli Powell; Michael S Pierce; Robert G. Manley; Karl D. Hirschman