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Tatsuya Sugimoto

National Institute of Advanced Industrial Science and Technology

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Publication

Featured researches published by Tatsuya Sugimoto.

Archive | 1998

Fluorinated hydrocarbons, detergents, deterging method, polymer-containing fluids, and method of forming polymer films

Toshirou Yamada; Kuniaki Goto; Tatsuya Sugimoto

Archive | 1998

Fluorinated, saturated hydrocarbons

Akira Sekiya; Toshirou Yamada; Takashi Uruma; Tatsuya Sugimoto

Archive | 2000

Method for purifying fluorinated hydrocarbon, solvent, lubricative polymer-containing liquid, and article having lubricative polymer film

Mitsuru Sugawara; Tatsuya Sugimoto; Toshiro Yamada; 俊郎 山田; 達也 杉本; 充 菅原

Archive | 1999

PRODUCTION OF FLUORINATED UNSATURATED HYDROCARBON

Tatsuya Sugimoto; Toshiro Yamada; 俊郎 山田; 達也 杉本

Archive | 2010

Hydrogen-containing halogenated cyclopentane, and method for producing heptafluorocyclopentene

Tatsuya Sugimoto; 達也 杉本

Archive | 2000

Gas for plasma reaction and method for production thereof

Toshinobu Hirayama; Toshiro Yamada; Tatsuya Sugimoto; Mitsuru Sugawara

Archive | 2004

Semiconductor device, method for manufacturing semiconductor device and gas for plasma cvd

Yasuo Kobayashi; Kohei Kawamura; Tadahiro Ohmi; Akinobu Teramoto; Tatsuya Sugimoto; Toshiro Yamada; Kimiaki Tanaka

Archive | 2000

METHOD FOR CLEANING OBJECT TO BE CLEANED

Mitsuru Sugawara; Tatsuya Sugimoto; 達也 杉本; 充 菅原

Archive | 2002

Gas for plasma reaction, process for producing the same and use

Mitsuru Sugawara; Toshiro Yamada; Tatsuya Sugimoto; Kimiaki Tanaka

Archive | 1998

Process for the preparation of compounds having -CH2-CHF-groups

Toshiro Yamada; Takashi Uruma; Tatsuya Sugimoto

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Toshiro Yamada

National Institute of Advanced Industrial Science and Technology

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Akira Sekiya

National Institute of Advanced Industrial Science and Technology

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Takanobu Mase

National Institute of Advanced Industrial Science and Technology

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Akinobu Teramoto

Mitsubishi

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Kohei Kawamura

Hiroshima University

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Masahiro Nakamura

Tokyo Electron

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Tadahiro Ohmi

Mitsubishi Electric

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Yasuo Kobayashi

Toyo University

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Kohei c

Mitsubishi

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Yasuo c

Mitsubishi

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