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Akinobu Teramoto

Tokyo Electron

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Publication

Featured researches published by Akinobu Teramoto.

Archive | 2003

PLASMA FILM FORMING DEVICE, PLASMA FILM FORMING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, LIQUID CRYSTAL DISPLAY DEVICE, AND ORGANIC EL ELEMENT

Tetsuya Goto; Tadahiro Omi; Hiroaki Tanaka; Akinobu Teramoto; 忠弘 大見; 章伸 寺本; 哲也 後藤; 宏明 田中

Archive | 2007

ION IMPLANTING APPARATUS AND ION IMPLANTING METHOD

Tadahiro Ohmi; Tetsuya Goto; Akinobu Teramoto; Takaaki Matsuoka

Archive | 2009

Solar cell wherein solar photovolatic thin film is directly formed on base

Yoshihide Wakayama; Kazuki Moyama; Tadahiro Ohmi; Akinobu Teramoto

Archive | 2008

APPARATUS AND METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENTS, AND PHOTOELECTRIC CONVERSION ELEMENT

Tadahiro Ohmi; Akinobu Teramoto; Tetsuya Goto; Kouji Tanaka

Archive | 2012

Method for fabricating semiconductor device and the semiconductor device

Akinobu Teramoto; Hiroshi Kambayashi; Hirokazu Ueda; Yuichiro Morozumi; Katsushige Harada; Kazuhide Hasebe; Tadahiro Ohmi

Archive | 2004

Substrate processing system and method for manufacturing semiconductor device

Tadahiro Ohmi; Akinobu Teramoto

Archive | 2009

Method of Chemical Mechanical Polishing

Takenao Nemoto; Tadahiro Ohmi; Akinobu Teramoto; Xun Gu; Ara Philipossian; Yasa Sampurno

Archive | 2008

METHOD OF OBSERVING PATTERN EVOLUTION USING VARIANCE AND FOURIER TRANSFORM SPECTRA OF FRICTION FORCES IN CMP

Yasa Sampurno; Ara Philipossian; Akinobu Teramoto; Takenao Nemoto

Archive | 2006

Plasma nitriding method, method for manufacturing semiconductor device and plasma processing apparatus

Tadahiro Ohmi; Akinobu Teramoto; Minoru Honda; Toshio Nakanishi

Archive | 2007

CHEMICAL SOLUTION OR PURE WATER FEEDER, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, OR SUBSTRATE PROCESSING METHOD

Tadahiro Ohmi; Akinobu Teramoto; Jiro Yamanaka; Nobutaka Mizutani; Osamu Nakamura; Takaaki Matsuoka; Ryoichi Ohkura

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Collaboration

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Tadahiro Ohmi

Tokyo Electron

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Takenao Nemoto

Tokyo Electron

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Tetsuya Goto

Tokyo Electron

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Takaaki Matsuoka

Tokyo Electron

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Xun Gu

Tohoku University

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Akihide Shirotori

Tohoku University

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Akihiko Hiroe

Tokyo Electron

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Ara Philipossian

Hitachi

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Hiroaki Tanaka

Kagawa University

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Hirokazu Matsumoto

University of Tokyo

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