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nan Taylor

Applied Materials

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Publication

Featured researches published by nan Taylor.

Archive | 1996

Reinigungsverfahren und Vorrichtung für Vakuumröhre in einem CVD-System

Ben Pang; David Cheung; Taylor; Sebastien Raoux; Mark Fodor

Archive | 1997

Reinigungsvorrichtung für Vakuumleitung in einer Substrat-Bearbeitungsvorrichtung Cleaning device for vacuum line in a substrate processing apparatus

Ben Pang; David Cheung; Taylor; Sebastien Raoux; Mark Fodor

Archive | 1996

Verfahren und Vorrichrung zur Reduzierung von Gasen bestehend aus Perfluoroverbindungen in Abgasen von einer Substrat-Bearbeitungsvorrichtung Procedures and Vorrichrung for reducing gases consisting of Perfluoroverbindungen in exhaust gases of a substrate processing apparatus

David Cheung; Sebastien Raoux; Judy H. Huang; Taylor; Mark Fodor; Kevin Fairbairn

Archive | 1996

Verfahren und Vorrichtung zur Reduzierung von Perfluorverbindungen enthaltenden Abgasen aus Substratbearbeitungsvorrichtungen. Method and apparatus for reducing perfluorocompound-containing exhaust gases from the substrate processing apparatuses.

David Cheung; Sebastien Raoux; Judy H. Huang; Taylor; Mark Fodor; Kevin Fairbairn

Archive | 1996

Verfahren und Vorrichrung zur Reduzierung von Gasen bestehend aus Perfluoroverbindungen in Abgasen von einer Substrat-Bearbeitungsvorrichtung

David Cheung; Sebastien Raoux; Judy H. Huang; Taylor; Mark Fodor; Kevin Fairbairn

Archive | 1996

Cleaning method and apparatus for vacuum tube in a CVD system

Ben Pang; David Cheung; Taylor; Sebastien Raoux; Mark Fodor

Archive | 1996

Verfahren und Vorrichtung zur Reduzierung von Perfluorverbindungen enthaltenden Abgasen aus Substratbearbeitungsvorrichtungen.

David Cheung; Sebastien Raoux; Judy H. Huang; Taylor; Mark Fodor; Kevin Fairbairn

Archive | 1996

Procedures and Vorrichrung for reducing gases consisting of Perfluoroverbindungen in exhaust gases of a substrate processing apparatus

David Cheung; Sebastien Raoux; Judy H. Huang; Taylor; Mark Fodor; Kevin Fairbairn

Archive | 1996

Method and apparatus for reducing perfluorocompound-containing exhaust gases from the substrate processing apparatuses.

David Cheung; Sebastien Raoux; Judy H. Huang; Taylor; Mark Fodor; Kevin Fairbairn

Archive | 1996

Vorrichrung method and for the reduction of gases consisting of Perfluoroverbindungen in exhaust gases from a substrate processing device

David Cheung; Sebastien Raoux; Judy H. Huang; Taylor; Mark Fodor; Kevin Fairbairn

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David Cheung

Applied Materials

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Mark Fodor

Applied Materials

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Sebastien Raoux

Applied Materials

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Judy H. Huang

Applied Materials

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Kevin Fairbairn

Applied Materials

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Ben Pang

Applied Materials

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