Teruhiko Kumada
Mitsubishi
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Publication
Featured researches published by Teruhiko Kumada.
international microprocesses and nanotechnology conference | 2005
M. Terai; Teruhiko Kumada; T. Ishibashi; Tetsuro Hanawa
To meet markets demands for high performance devices, we have studied various resolution enhancement techniques (RET), such as off axis illumination, phase shift masks, optical proximity correction, resist thermal reflow, and chemical shrinkage process etc. RELACS (resolution enhancement lithography assisted by chemical shrink) is one of the most useful technology among chemical shrink processes. We have introduced KrF-RELACS process into mass production phase. However, in the case of ArF lithography, we are not able to be satisfied with shrinkage performance of conventional RELACS materials. To improve this matter, we paid attention to the chemically difference of side chain between KrF resist and ArF resist polymers.
Archive | 2002
Hideharu Nobutoki; Teruhiko Kumada; Toshiyuki Toyoshima; Naoki Yasuda; Suguru Nagae
Archive | 1990
Youko Tanaka; Shigeru Kubota; Hideo Horibe; Hiroshi Koezuka; Teruhiko Kumada
Archive | 2002
Hideharu Nobutoki; Teruhiko Kumada; Toshiyuki Toyoshima; Naoki Yasuda; Suguru Nagae
Archive | 2002
Teruhiko Kumada; Atsuko Fujino; Kazuyuki Maetoko
Archive | 2003
Teruhiko Kumada; Toshiyuki Toyoshima; Hideharu Nobutoki; Takeo Ishibashi; Yoshiharu Ono; Junjiro Sakai
Archive | 2001
Atsuko Fujino; Teruhiko Kumada; Atsushi Oshida; Koji Tange; Hitoshi Fukuma
Archive | 1997
Teruhiko Kumada; Atsuko Sasahara; Youko Tanaka; Hideo Horibe; Shigeru Kubota; Hiroshi Koezuka; Tetsuro Hanawa
Archive | 2005
Hideharu Nobutoki; Teruhiko Kumada; Toshiyuki Toyoshima; Naoki Yasuda; Suguru Nagae
Archive | 2001
Toyoki Kitayama; Kenji Itoga; Kenji Marumoto; Atsuko Fujino; Teruhiko Kumada
