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Dive into the research topics where Tetsuo Fukuoka is active.

Publication


Featured researches published by Tetsuo Fukuoka.


Archive | 2001

Heat Processing apparatus

Eiichi Shirakawa; Tetsuo Fukuoka; Tsuyoshi Nogami


Archive | 2006

Heating apparatus, and coating and developing apparatus

Tetsuo Fukuoka; Masami Akimoto; Takahiro Kitano; Yoshio Kimura; Shinichi Hayashi; Hikaru Ito


Archive | 2007

Hot plate and process for producing the same

Tetsuo Fukuoka; Takahiro Kitano


Archive | 2010

Apparatus and method for heating substrate and coating and developing system

Shinichi Hayashi; Tetsuo Fukuoka; Tetsuya Oda; Hiroaki Inadomi


Archive | 2005

Heating apparatus, coating apparatus, and developing apparatus

Masami Akumoto; Tetsuo Fukuoka; Shinichi Hayashi; Akira Ito; Yoshio Kimura; Takahiro Kitano; 晃 伊東; 高弘 北野; 義雄 木村; 伸一 林; 哲夫 福岡; 正巳 飽本


Archive | 2008

Vaporizer, substrate processing apparatus, substrate processing method, and storage medium

Tetsuo Fukuoka; Takahiro Kitano; 高広 北野; 哲夫 福岡


Archive | 2006

Heating apparatus, coating and development apparatus, and heating method

Tetsuo Fukuoka; Takahiro Kitano; Nobuaki Matsuoka


Archive | 2006

Temperature measuring device, thermal processor having temperature measurement function and temperature measurement method

Noboyuki Sata; Takahiro Kitano; Tetsuo Fukuoka; Toshiyuki Matsumoto; Tomohide Minami


Archive | 2010

HYDROPHOBICIZING APPARATUS, HYDROPHOBICIZING METHOD AND STORAGE MEDIUM

Satoshi Shimmura; Tetsuo Fukuoka; Takahiro Kitano


Archive | 2008

HEATING APPARATUS AND HEATING METHOD

Tetsuo Fukuoka; Takahiro Kitano; Kazuo Terada

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