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Tetsuo Fukuoka

Tokyo Electron

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Publication

Featured researches published by Tetsuo Fukuoka.

Archive | 2001

Heat Processing apparatus

Eiichi Shirakawa; Tetsuo Fukuoka; Tsuyoshi Nogami

Archive | 2006

Heating apparatus, and coating and developing apparatus

Tetsuo Fukuoka; Masami Akimoto; Takahiro Kitano; Yoshio Kimura; Shinichi Hayashi; Hikaru Ito

Archive | 2007

Hot plate and process for producing the same

Tetsuo Fukuoka; Takahiro Kitano

Archive | 2010

Apparatus and method for heating substrate and coating and developing system

Shinichi Hayashi; Tetsuo Fukuoka; Tetsuya Oda; Hiroaki Inadomi

Archive | 2005

Heating apparatus, coating apparatus, and developing apparatus

Masami Akumoto; Tetsuo Fukuoka; Shinichi Hayashi; Akira Ito; Yoshio Kimura; Takahiro Kitano; 晃 伊東; 高弘 北野; 義雄 木村; 伸一 林; 哲夫 福岡; 正巳 飽本

Archive | 2008

Vaporizer, substrate processing apparatus, substrate processing method, and storage medium

Tetsuo Fukuoka; Takahiro Kitano; 高広 北野; 哲夫 福岡

Archive | 2006

Heating apparatus, coating and development apparatus, and heating method

Tetsuo Fukuoka; Takahiro Kitano; Nobuaki Matsuoka

Archive | 2006

Temperature measuring device, thermal processor having temperature measurement function and temperature measurement method

Noboyuki Sata; Takahiro Kitano; Tetsuo Fukuoka; Toshiyuki Matsumoto; Tomohide Minami

Archive | 2010

HYDROPHOBICIZING APPARATUS, HYDROPHOBICIZING METHOD AND STORAGE MEDIUM

Satoshi Shimmura; Tetsuo Fukuoka; Takahiro Kitano

Archive | 2008

HEATING APPARATUS AND HEATING METHOD

Tetsuo Fukuoka; Takahiro Kitano; Kazuo Terada

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Collaboration

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Takahiro Kitano

Tokyo Electron

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Kazuo Terada

Tokyo Electron

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Shinichi Hayashi

Fujitsu

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Yoshio Kimura

Tokyo Electron

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Nobuaki Matsuoka

Tokyo Electron

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Kazuhiko Ito

Tokyo Electron

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Takayuki Ishii

Tokyo Electron

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Tomohide Minami

Tokyo Electron

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Toshiyuki Matsumoto

Tokyo Electron

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Eiichi Shirakawa

Tokyo Electron

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