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Thanh Pham

Applied Materials

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Publication

Featured researches published by Thanh Pham.

Archive | 2003

Sequential gas flow oxide deposition technique

Farhad Moghadam; Michael S. Cox; Padmanabhan Krishnaraj; Thanh Pham

Archive | 2006

In-situ-etch-assisted HDP deposition

M. Karim; Dongqing Li; Jeong Byun; Thanh Pham

Archive | 2003

In-situ-etch-assisted HDP deposition using SiF4 and hydrogen

M. Ziaul Karim; Dongqing Li; Jeong Soo Byun; Thanh Pham

Archive | 1997

Lid assembly for a process chamber employing asymmetric flow geometries

Won B. Bang; Ellie Yieh; Thanh Pham

Archive | 2006

[DEPOSITION-SELECTIVE ETCH-DEPOSITION PROCESS FOR DIELECTRIC FILM GAPFILL]

Lin Zhang; Xiaolin Chen; Dongqing Li; Thanh Pham; Farhad Moghadam; Zhuang Li; Padmanabhan Krishnaraj

Archive | 1997

Liquid flow rate estimation and verification by direct liquid measurement

Yen-Kun Victor Wang; Fong Chang; Thanh Pham; Jeff Plante

Archive | 2004

Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate

Jennifer Y. Sun; Senh Thach; James Dempster; Li Xu; Thanh Pham

Archive | 1998

Deposition resistant lining for CVD chamber

Won B. Bang; Ellie Yieh; Thanh Pham

Archive | 2002

Deposition process for high aspect ratio trenches

Farhad Moghadam; Michael S. Cox; Padmanabhan Krishnaraj; Thanh Pham; Zhenjiang Cui

Archive | 2003

Gas delivery system for semiconductor processing

Sudhir Gondhalekar; Padmanabhan Krishnaraj; Tom K. Cho; Muhammad Rasheed; Hemant P. Mungekar; Thanh Pham; Zhong Qiang Hua

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Collaboration

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Dongqing Li

Applied Materials

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Ellie Yieh

Applied Materials

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Farhad Moghadam

Applied Materials

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Padmanabhan Krishnaraj

Applied Materials

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Bang C. Nguyen

Applied Materials

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Jeong Soo Byun

Applied Materials

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M. Ziaul Karim

Applied Materials

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Stuardo Robles

Applied Materials

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Won B. Bang

Applied Materials

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Fong Chang

Applied Materials

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