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Dive into the research topics where Thanh Pham is active.

Publication


Featured researches published by Thanh Pham.


Archive | 2003

Sequential gas flow oxide deposition technique

Farhad Moghadam; Michael S. Cox; Padmanabhan Krishnaraj; Thanh Pham


Archive | 2006

In-situ-etch-assisted HDP deposition

M. Karim; Dongqing Li; Jeong Byun; Thanh Pham


Archive | 2003

In-situ-etch-assisted HDP deposition using SiF4 and hydrogen

M. Ziaul Karim; Dongqing Li; Jeong Soo Byun; Thanh Pham


Archive | 1997

Lid assembly for a process chamber employing asymmetric flow geometries

Won B. Bang; Ellie Yieh; Thanh Pham


Archive | 2006

[DEPOSITION-SELECTIVE ETCH-DEPOSITION PROCESS FOR DIELECTRIC FILM GAPFILL]

Lin Zhang; Xiaolin Chen; Dongqing Li; Thanh Pham; Farhad Moghadam; Zhuang Li; Padmanabhan Krishnaraj


Archive | 1997

Liquid flow rate estimation and verification by direct liquid measurement

Yen-Kun Victor Wang; Fong Chang; Thanh Pham; Jeff Plante


Archive | 2004

Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate

Jennifer Y. Sun; Senh Thach; James Dempster; Li Xu; Thanh Pham


Archive | 1998

Deposition resistant lining for CVD chamber

Won B. Bang; Ellie Yieh; Thanh Pham


Archive | 2002

Deposition process for high aspect ratio trenches

Farhad Moghadam; Michael S. Cox; Padmanabhan Krishnaraj; Thanh Pham; Zhenjiang Cui


Archive | 2003

Gas delivery system for semiconductor processing

Sudhir Gondhalekar; Padmanabhan Krishnaraj; Tom K. Cho; Muhammad Rasheed; Hemant P. Mungekar; Thanh Pham; Zhong Qiang Hua

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