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Padmanabhan Krishnaraj

Applied Materials

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Publication

Featured researches published by Padmanabhan Krishnaraj.

Archive | 2003

Sequential gas flow oxide deposition technique

Farhad Moghadam; Michael S. Cox; Padmanabhan Krishnaraj; Thanh Pham

Archive | 1999

Gas distribution system for a CVD processing chamber

Tetsuya Ishikawa; Padmanabhan Krishnaraj; Feng Gao; Alan W. Collins; Lily L. Pang

Archive | 2002

Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas

Shamouil Shamouilian; Canfeng Lai; Michael S. Cox; Padmanabhan Krishnaraj; Tsutomu Tanaka; Sebastien Raoux; Peter I. Porshnev; Thomas Nowak

Archive | 2005

In situ application of etch back for improved deposition into high-aspect-ratio features

Padmanabhan Krishnaraj; Pavel Ionov; Canfeng Lai; Michael S. Cox; Shamouil Shamouilian

Archive | 2006

[DEPOSITION-SELECTIVE ETCH-DEPOSITION PROCESS FOR DIELECTRIC FILM GAPFILL]

Lin Zhang; Xiaolin Chen; Dongqing Li; Thanh Pham; Farhad Moghadam; Zhuang Li; Padmanabhan Krishnaraj

Archive | 2004

Deposition of low dielectric constant films by N2O addition

Francimar Schmitt; Kimberly Branshaw; Padmanabhan Krishnaraj; Hichem M'Saad

Archive | 1999

Remote plasma cleaning method for processing chambers

Ravi Rajagopalan; Patricia M. Liu; Pravin K. Narwankar; Huyen T. Tran; Padmanabhan Krishnaraj; Alan Ablao; Tim Casper

Archive | 2002

Deposition process for high aspect ratio trenches

Farhad Moghadam; Michael S. Cox; Padmanabhan Krishnaraj; Thanh Pham; Zhenjiang Cui

Archive | 2003

Gas delivery system for semiconductor processing

Sudhir Gondhalekar; Padmanabhan Krishnaraj; Tom K. Cho; Muhammad Rasheed; Hemant P. Mungekar; Thanh Pham; Zhong Qiang Hua

Archive | 2002

Methods and apparatus for producing stable low k FSG film for HDP-CVD

Padmanabhan Krishnaraj; Robert Duncan; Joseph V. D'souza; Alan W. Collins; Nasreen Gazala Chopra; Kimberly Branshaw

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Collaboration

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Michael S. Cox

Applied Materials

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Lily L. Pang

Applied Materials

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Sudhir Gondhalekar

Applied Materials

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Alan W. Collins

Applied Materials

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Bruno Geoffrion

Applied Materials

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Kimberly Branshaw

Applied Materials

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Thanh Pham

Applied Materials

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Tom K. Cho

Applied Materials

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Canfeng Lai

Applied Materials

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Farhad Moghadam

Applied Materials

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