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Thierry Barge

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Publication

Featured researches published by Thierry Barge.

Archive | 1997

Method for making a thin film on a support and resulting structure including an additional thinning stage before heat treatment causes micro-cavities to separate substrate element

Bernard Aspar; Michel Bruel; Thierry Barge

Archive | 1999

Heat treatment method for semiconductor substrates

Christophe Maleville; Thierry Barge; Bernard Aspar; Hubert Moriceau; André-Jacques Auberton-Herve

Archive | 2002

Method for treating substrates for microelectronics and substrates obtained by said method

Thierry Barge; Bruno Ghyselen; Toshiaki Iwamatsu; Hideki Naruoka; Junichiro Furihata; Kiyoshi Mitani

Archive | 2000

Method for recycled separated wafer and recycled separated wafer

Susumu Kuwabara; Kiyoshi Mitani; Naoto Tate; Masatake Nakano; Thierry Barge; Christophe Maleville

Archive | 2000

Method for treating substrates for microelectronics and substrates obtained according to said method

Thierry Barge; André Auberton-Herve; Hiroji Aga; Naoto Tate

Archive | 2006

Process for treating substrates for the microelectronics industry, and substrates obtained by this process

Thierry Barge; André Auberton-Herve; Hiroji Aga; Naoto Tate

Archive | 2002

Device for detaching substrates and the associated method

Thierry Barge; Walter Schwarzenbach; Jean-Marc Waechter; Thuan Truong; Bruno Ghyselen

Archive | 2008

Process for assembling wafers by means of molecular adhesion

Marcel Broekaart; Bernard Aspar; Thierry Barge; Chrystelle Lagahe Blanchard

Archive | 2009

A method of assembling wafers by molecular bonding

Marcel Broekaart; Bernard Aspar; Chrystelle Lagahe; Thierry Barge

Archive | 2006

Apparatus and method for splitting substrates

Thierry Barge; Walter Schwarzenbach; Jean-Marc Waechter; Thuan Truong; Bruno Ghyselen

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Collaboration

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Bernard Aspar

Soitec

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Kiyoshi Mitani

Duke University

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Naoto Tate

East Tennessee State University

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Christophe Maleville

Soitec

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Marcel Broekaart

Soitec

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Hideki Naruoka

Renesas Electronics

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Toshiaki Iwamatsu

Renesas Electronics

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Junichiro Furihata

East Tennessee State University

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Jean-Marc Waechter

Soitec

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Walter Schwarzenbach

Soitec

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