Thomas Kunstmann
Infineon Technologies
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Publication
Featured researches published by Thomas Kunstmann.
advanced semiconductor manufacturing conference | 2009
Thomas Kunstmann; Stefan Paulus; Ing-Shin Chen; Horst Auer; Lin Feng; Richard Chism; Jeffrey F. Roeder
Doped and undoped SACVD recipes were investigated with respect to their clean performance with a new calorimetric probe sensor. Endpoint curves were collected with a standalone software utility, and results were analyzed post-acquisition offline. The impact of preventive maintenance (PM) activities and different single/multiple cleans towards clean performance were investigated. A numerical model for the clean behavior after annual chamber PMs was developed. Clean time optimization was carried out for different recipes.
Archive | 2010
Albert Birner; Uwe Hoeckele; Thomas Kunstmann; Uwe Seidel
Archive | 2011
Manfred Engelhardt; Hans-Joerg Timme; Ivan Nikitn; Manfred Frank; Thomas Kunstmann; Werner Robl; Guenther Ruhl
Archive | 2009
Manfred Frank; Ivan Nikitin; Thomas Kunstmann
Archive | 2014
Johann Strasser; Thomas Kunstmann; Manfred Frank; Werner Robl; Maximilian Krug; Simon Faiss; Matthias Mueller
Archive | 2009
Albert Birner; Uwe Hoeckele; Thomas Kunstmann; Uwe Seidel
Archive | 2013
Michael Krenzer; Thomas Kunstmann; Eva-Maria Hess; Manfred Frank
Archive | 2012
Manfred Engelhardt; Manfred Frank; Thomas Kunstmann; Ivan Nikitin; Werner Robl; Guenther Ruhl; Hans-Jörg Timme
Archive | 2017
Michael Krenzer; Thomas Kunstmann; Eva-Maria Hess; Manfred Frank
Archive | 2014
Manfred Frank; Eva-Maria Hess; Michael Krenzer; Thomas Kunstmann
