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Thomas W. Novak

Nikon

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Publication

Featured researches published by Thomas W. Novak.

Archive | 2004

Run-off path to collect liquid for an immersion lithography apparatus

Thomas W. Novak

Archive | 2000

Electromagnetic alignment and scanning apparatus

Akimitsu Ebihara; Thomas W. Novak

Archive | 1999

Electro-magnetic motor cooling system

Thomas W. Novak

Archive | 2000

Stage device, and exposure apparatus with linear motor having polygonal shaped coil units

Andrew J. Hazelton; Thomas W. Novak

Archive | 2001

Low distortion kinematic reticle support

Thomas W. Novak

Archive | 2003

REFLECTIVE PROJECTION OPTICAL SYSTEM WITH DISCRETE ACTUATOR

Andrew J. Hazelton; Thomas W. Novak; Alton H. Phillips; Douglas C. Watson; アンドリュー ジェイ ヘツェルトン; アントン エイチ フィリップス; ダグラス シー ワトソン; トーマス ノバック

Archive | 2008

KINEMATIC CHUCKS FOR RETICLES AND OTHER PLANAR BODIES

Scott Coakley; Thomas W. Novak; Douglas C. Watson; Alton H. Phillips

Archive | 2007

Exposure apparatus that includes a phase change circulation system for movers

Thomas W. Novak; Michale B. Binnard; Alex Ka Tim Poon; Masahiro Totsu; Leonard Wai Fung Kho; Gaurav Keswani

Archive | 2002

Method and apparatus for automatically transporting and precisely positioning work pieces at processing stations

Thomas W. Novak

Archive | 2002

Simplified reticle stage removal system for an electron beam system

Thomas W. Novak; Douglas C. Watson

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Collaboration

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Andrew J. Hazelton

Nikon

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Douglas C. Watson

Nikon

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Douglas C. Watson

Nikon

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Alex Ka Tim Poon

Nikon

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Gaurav Keswani

Nikon

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Leonard Wai Fung Kho

Nikon

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Masahiro Totsu

Nikon

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Michael B. Binnard

Nikon

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Michale B. Binnard

Nikon

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Akimitsu Ebihara

Nikon

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