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Akimitsu Ebihara

Nikon

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Publication

Featured researches published by Akimitsu Ebihara.

Archive | 1994

Precision motion stage with single guide beam and follower stage

W. Thomas Novak; Zahirudeen Premji; Uday G. Nayak; Akimitsu Ebihara

Archive | 2000

Electromagnetic alignment and scanning apparatus

Akimitsu Ebihara; Thomas W. Novak

Archive | 2005

Projection optical device and exposure apparatus

Akimitsu Ebihara; Martin E. Lee; Bausan Yuan

Archive | 2013

Exposure apparatus, and device manufacturing method

Akimitsu Ebihara

Archive | 2000

Wafer positioner with planar motor and mag-lev fine stage

Andrew J. Hazelton; W. Thomas Novak; Akimitsu Ebihara

Archive | 2000

Precision scanning apparatus and method with fixed and movable guide members

W. Thomas Novak; Zahirudeen Premji; Uday G. Nayak; Akimitsu Ebihara

Archive | 1998

Tilt and movement apparatus using flexure and air cylinder

Akimitsu Ebihara

Archive | 2006

Stage apparatus, coordinate correction method for the stage apparatus, exposure apparatus, and device production method

Akimitsu Ebihara; Masato Takahashi

Archive | 2005

Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambers

Bausan Yuan; Martin E. Lee; Alton H. Phillips; Ping-wei Chang; Akimitsu Ebihara

Archive | 2001

Scanning exposure methods

Akimitsu Ebihara

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Masashi Okada

Nikon

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Bausan Yuan

Nikon

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Martin E. Lee

Nikon

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W. Thomas Novak

Nikon

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Masato Takahashi

Nikon

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Alton H. Phillips

Nikon

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Andrew J. Hazelton

Nikon

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Ping-wei Chang

Nikon

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Thomas W. Novak

Nikon

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