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Dive into the research topics where Thomas Werner Zilbauer is active.

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Featured researches published by Thomas Werner Zilbauer.


IEEE Transactions on Electron Devices | 2009

Fringing-Induced Drain Current Improvement in the Tunnel Field-Effect Transistor With High-

Martin Schlosser; Krishna Kumar Bhuwalka; Martin Sauter; Thomas Werner Zilbauer; Torsten Sulima; Ignaz Eisele

The tunnel field-effect transistor (tunnel FET) is a promising candidate for future CMOS technology. Its device characteristics have been subject to a variety of experimental and theoretical studies. In this paper, we evaluate the influence of using a high-kappa gate dielectric in the tunnel FET compared to a standard silicon oxide with same equivalent oxide thickness, which exhibits a quite different behavior compared to a conventional MOSFET due to its totally different working principle. It turns out that the fringing field effect, while deteriorating conventional MOSFET characteristics, leads to a much higher on-current comparable with actual conventional MOSFETs, a subthreshold slope of the tunnel FET lower than the theoretical limit for conventional MOSFETs, and a massive improved inverter delay, underlining its prospect for future applications. This leads to the conclusion that high-kappa materials with permittivities > 30 can advantageously be used in CMOS technology, giving rise to further technological development.


Archive | 2012

\kappa

Thomas Werner Zilbauer; Jürgen Grillmayer


Archive | 2012

Gate Dielectrics

Elisabeth Sommer; Philipp Obermeyer; Thomas Werner Zilbauer; Inge Vermeir; Daniel Severin; Niels Kuhr; Markus Kress; Christof Kurthen; Ursula Schmidt; Stefan Klein; Susanne Buschbaum; Konrad Schwanitz; Christian Stoemmer; Tobias Stolley; Martin Rohde; Andreas Rembeck


Archive | 2012

TRANSPARENT BODY FOR USE IN A TOUCH SCREEN PANEL MANUFACTURING METHOD AND SYSTEM

Jürgen Grillmayer; Thomas Werner Zilbauer


Archive | 2007

Thin film solar fabrication process, deposition method for tco layer, and solar cell precursor layer stack

Thomas Werner Zilbauer; Ignaz Eisele; Jan Matusche; Ursular Ingeborg Schmidt


Archive | 2013

Transparent body for use in a touch panel and its manufacturing method and apparatus

Thomas Werner Zilbauer


Archive | 2017

Hafnium oxide ALD process

Thomas Werner Zilbauer; Anke Hellmich; Reiner Hinterschuster; Uwe Mühlfeld; Bernhard Stock; Hans Wolf; Marcus Bender


Archive | 2015

TRANSPARENT BODY WITH SINGLE SUBSTRATE AND ANTI-REFLECTION AND/OR ANTI-FINGERPRINT COATING AND METHOD OF MANUFACTURING THEREOF

Thomas Werner Zilbauer; Marcus Bender


Archive | 2015

A deposition apparatus that is used for deposit material on base plate

Stefan Keller; Thomas Werner Zilbauer; Anke Hellmich


Archive | 2015

DEPOSITION APPARATUS WITH GAS SUPPLY AND METHOD FOR DEPOSITING MATERIAL

Anke Hellmich; Thomas Werner Zilbauer; Jose Manuel Dieguez-Campo; Stefan Keller; Georg Jost

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Ignaz Eisele

Information Technology Institute

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