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Tianniu Chen

Air Products & Chemicals

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Publication

Featured researches published by Tianniu Chen.

Archive | 2014

Composition for titanium nitride hard mask and etch residue removal

William Jack Casteel; Seiji Inaoka; Madhukar Bhaskara Rao; Brenda Ross; Yi-Chia Lee; Wen Dar Liu; Tianniu Chen

Archive | 2016

Titanium nitride hard mask and etch residue removal

William Jack Casteel; Seiji Inaoka; Wen Dar Liu; Tianniu Chen

Archive | 2017

Etching Compositions and Methods for Using Same

Wen Dar Liu; Yi-Chia Lee; Tianniu Chen; Thomas Mebrahtu; Aiping Wu; Edward Chia Kai Tseng; Gene Everad Parris

Archive | 2016

ETCHANT SOLUTION AND METHOD OF USE THEREOF

Tianniu Chen; William Jack Casteel; Gene Everad Parris

Archive | 2016

TiN Hard Mask And Etch Residual Removal

Wen Dar Liu; Yi-Chia Lee; William Jack Casteel; Tianniu Chen; Rajiv Krishan Agarwal; Madhukar Bhaskara Rao

Archive | 2016

Selectively Removing Titanium Nitride Hard Mask and Etch Residue Removal

William Jack Casteel; Seiji Inaoka; Wen Dar Liu; Tianniu Chen

Archive | 2016

Élimination sélective de masque dur au nitrure de titane et élimination de résidus de gravure

William Jack Casteel; Seiji Inaoka; Wen Dar Liu; Tianniu Chen

Archive | 2016

Stripping Compositions Having High WN/W Etching Selectivity

Wen Dar Liu; Yi-Chia Lee; Tianniu Chen; William Jack Casteel; Seiji Inaoka; Gene Everad Parris

Archive | 2016

Photoresist Cleaning Composition Used in Photolithography and a Method for Treating Substrate Therewith

Randy Li-Kai Chang; Gene Everad Parris; Hsiu Mei Chen; Yi-Chia Lee; Wen Dar Liu; Tianniu Chen; Laura M. Matz; Ryback Li Chang Lo; Ling-Jen Meng

Archive | 2015

Compositions de décapage ayant une grande sélectivité de gravure wn/w

Wen Dar Liu; Yi-Chia Lee; Tianniu Chen; Jr. William Jack Casteel; Seiji Inaoka; Gene Everad Parris

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Collaboration

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Wen Dar Liu

Air Products

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Seiji Inaoka

Air Products

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William Jack Casteel

Air Products

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Yi-Chia Lee

Air Products

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Gene Everad Parris

Air Products

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Madhukar Bhaskara Rao

Air Products

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Aiping Wu

Air Products

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Brenda Ross

Air Products

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Edward Chia Kai Tseng

Air Products

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Hsiu Mei Chen

Air Products

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