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Dive into the research topics where Yi-Chia Lee is active.

Publication


Featured researches published by Yi-Chia Lee.


Archive | 2010

Water-rich stripping and cleaning formulation and method for using same

Madhukar Bhaskara Rao; Gautam Banerjee; Thomas Wieder; Yi-Chia Lee; Wen Dar Liu; Aiping Wu


Archive | 2009

Stripper for dry film removal

Wen Dar Liu; Yi-Chia Lee; Archie Liao; Madhukar Bhaskara Rao; Matthew I. Egbe; Chimin Sheu; Michael Walter Legenza


Archive | 2012

Cleaning formulations and method of using the cleaning formulations

Aiping Wu; Yi-Chia Lee; Wen Dar Liu; Machukar Bhaskara Rao; Gautam Banerjee


Archive | 2014

Composition for titanium nitride hard mask and etch residue removal

William Jack Casteel; Seiji Inaoka; Madhukar Bhaskara Rao; Brenda Ross; Yi-Chia Lee; Wen Dar Liu; Tianniu Chen


Archive | 2009

Stripper for dry film removal and method using the same

Wen Dar Liu; Yi-Chia Lee; Archie Liao; Madhukar Bhaskara Rao; Matthew I. Egbe; Chimin Sheu; Michael Walter Legenza


Archive | 2009

Stripper for copper/low K BEOL clean

Yi-Chia Lee; Wen Dar Liu; Archie Liao; Matthew I. Egbe; Madhukar Bhaskara Rao; Michael Walter Legenza; Chimin Sheu


Archive | 2015

COPPER CORROSION INHIBITION SYSTEM

Wen Dar Liu; Seiji Inaoka; Yi-Chia Lee; Agnes Derecskei-Kovacs


Archive | 2017

Etching Compositions and Methods for Using Same

Wen Dar Liu; Yi-Chia Lee; Tianniu Chen; Thomas Mebrahtu; Aiping Wu; Edward Chia Kai Tseng; Gene Everad Parris


Archive | 2016

TiN Hard Mask And Etch Residual Removal

Wen Dar Liu; Yi-Chia Lee; William Jack Casteel; Tianniu Chen; Rajiv Krishan Agarwal; Madhukar Bhaskara Rao


Archive | 2016

Stripping Compositions Having High WN/W Etching Selectivity

Wen Dar Liu; Yi-Chia Lee; Tianniu Chen; William Jack Casteel; Seiji Inaoka; Gene Everad Parris

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