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Dive into the research topics where Timothy L. Jackson is active.

Publication


Featured researches published by Timothy L. Jackson.


Design, process integration, and characterization for microelectronics. Conference | 2002

Wafer-level Fault Detection and Classification on a photo track in a high volume fab

Timothy L. Jackson; Richard J. Markle; Clinton W. Miller; Edward C. Stewart; Robert A. Crowell

We will discuss Advanced Micro Devicess (AMD) Fault Detection and Classification (FDC) program strategy and our six-step project template that we have identified that must be addressed for any successful FDC effort. We will discuss the recent development and implementation of a wafer-level FDC system on a TEL CLEAN TRAC ACT 8 photo track system in AMDs Fab25, a high volume microprocessor factory. We will present our approach to designing and implementing this FDC system and demonstrate its ability to automatically identify specific wafers within a lot that require manual review. Upon manual review, the decision can be made to rework the specific wafers or the lot.


Archive | 2003

Method and apparatus for performing metrology dispatching based upon fault detection

Naomi M. Jenkins; Timothy L. Jackson; Howard E. Castle; Brian K. Cusson


Archive | 2001

Method and apparatus for fault detection using multiple tool error signals

Timothy L. Jackson; Richard J. Markle; Edward C. Stewart


Archive | 2002

Process control based on an estimated process result

Michael L. Miller; Thomas J. Sonderman; Alexander J. Pasadyn; Richard J. Markle; Brian K. Cusson; Patrick M. Cowan; Timothy L. Jackson; Naomi M. Jenkins


Archive | 2002

Verifying a fault detection result based on a process control state

Matthew A. Purdy; Richard J. Markle; Timothy L. Jackson


Archive | 2003

Method and apparatus for adaptive sampling based on process covariance

Richard Good; Timothy L. Jackson; Brian K. Cusson


Archive | 2011

Verfahren und System zum Ausführen einer Messverteilung auf der Grundlage einer Fehlererkennung und computerlesbares Speichermedium

Naomi M. Jenkins; Timothy L. Jackson; Howard E. Castle; Brian K. Cusson


Archive | 2004

Vorrichtung zum Ausführen einer Messverteilung auf der Grundlage einer Fehlererkennung Apparatus for performing a measurement on the basis of distribution of an error detection

Howard E. Castle; Brian K. Cusson; Timothy L. Jackson; Naomi M. Jenkins


Archive | 2004

Apparatus for carrying out a measuring distribution on the basis of an error detection

Howard E. Castle; Brian K. Cusson; Timothy L. Jackson; Naomi M. Jenkins


Archive | 2004

A method and system for performing a measurement distribution on the basis of an error detection and computer readable storage medium

Howard E. Castle; Brian K. Cusson; Timothy L. Jackson; Naomi M. Jenkins

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