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Dive into the research topics where Alexander J. Pasadyn is active.

Publication


Featured researches published by Alexander J. Pasadyn.


Archive | 2005

Adaptive sampling method for improved control in semiconductor manufacturing

Alexander J. Pasadyn; Anthony J. Toprac; Michael L. Miller


Archive | 2000

Method and apparatus for dynamic sampling of a production line

Alexander J. Pasadyn; Anthony J. Toprac


Archive | 2002

Kalman filter state estimation for a manufacturing system

Alexander J. Pasadyn


Archive | 2002

Dynamic process state adjustment of a processing tool to reduce non-uniformity

Thomas J. Sonderman; Alexander J. Pasadyn; Christopher A. Bode


Archive | 2001

Method and apparatus for determining output characteristics using tool state data

Alexander J. Pasadyn; Thomas J. Sonderman


Archive | 2002

Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters

Alexander J. Pasadyn; Thomas J. Sonderman


Archive | 2002

Dynamic targeting for a process control system

Alexander J. Pasadyn; Thomas J. Sonderman; Jin Wang


Archive | 2001

Method and apparatus for wafer-to-wafer control with partial measurement data

Alexander J. Pasadyn; Matthew A. Purdy


Archive | 2001

Method and apparatus for determining a sampling plan based on process and equipment fingerprinting

Thomas J. Sonderman; Alexander J. Pasadyn; Christopher A. Bode


Archive | 2001

Use of endpoint system to match individual processing stations wirhin a tool

Alexander J. Pasadyn; Joyce S. Oey Hewett

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