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Dive into the research topics where Edward C. Stewart is active.

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Featured researches published by Edward C. Stewart.


Design, process integration, and characterization for microelectronics. Conference | 2002

Wafer-level Fault Detection and Classification on a photo track in a high volume fab

Timothy L. Jackson; Richard J. Markle; Clinton W. Miller; Edward C. Stewart; Robert A. Crowell

We will discuss Advanced Micro Devicess (AMD) Fault Detection and Classification (FDC) program strategy and our six-step project template that we have identified that must be addressed for any successful FDC effort. We will discuss the recent development and implementation of a wafer-level FDC system on a TEL CLEAN TRAC ACT 8 photo track system in AMDs Fab25, a high volume microprocessor factory. We will present our approach to designing and implementing this FDC system and demonstrate its ability to automatically identify specific wafers within a lot that require manual review. Upon manual review, the decision can be made to rework the specific wafers or the lot.


Archive | 2001

Method and apparatus for fault detection using multiple tool error signals

Timothy L. Jackson; Richard J. Markle; Edward C. Stewart


Archive | 2005

Analyzing error signals based on fault detection

Edward C. Stewart


Archive | 2002

Method and apparatus for measuring defects

Edward C. Stewart; Jason A. Grover


Archive | 2005

Dynamic maintenance of manufacturing system components

Edward C. Stewart


Archive | 2005

Method and apparatus for impasse detection and resolution

Susan Hickey; Edward C. Stewart; Jason A. Grover; Cabe W. Nicksic


Archive | 2010

Dynamic tool scheduling based upon defects

Edward C. Stewart


Archive | 1999

Stepper with exposure time monitor

Edward C. Stewart; Curtis Warren Doss; Richard D. Edwards


Archive | 2002

Method and apparatus for dynamically enabling trace data collection

Edward C. Stewart; Susan Hickey


Archive | 2001

Method and apparatus for controlling focus based on a thickness of a layer of photoresist

Scott Bushman; Anastasia Oshelski Peterson; Edward C. Stewart; Curtis Warren Doss

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