Tom Kamp | Researchain

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Featured researches published by Tom Kamp.

Archive | 2003

Variable temperature processes for tunable electrostatic chuck

Tom Kamp; Richard A. Gottscho; Steve Lee; Chris Lee; Yoko Yamaguchi; Vahid Vahedi; Aaron Eppler

Archive | 2003

Apparatus and method for controlling etch depth

Tom Kamp; Alan J. Miller; Vijayakumar C. Venugopal

Archive | 2014

Controlling cd and cd uniformity with trim time and temperature on a wafer by wafer basis

Yoshie Kimura; Tom Kamp; Eric A. Pape; R. Deshpande; Gowri Kamarthy

Archive | 2010

PLASMA ETCH METHOD TO REDUCE MICRO-LOADING

Tom Kamp; Qian Fu; I. C. Jang; Linda Braly; Shenjian Liu

Archive | 2010

Hardmask trim method

Tom Kamp

Archive | 2010

Variable temperature method for tunable electrostatic chuck

Aaron Eppler; Richard A. Gottscho; Tom Kamp; Chris Lee; Steve Lee; Vahid Vahedi; Yoko Yamaguchi; ヴァヒドヴァヘディ; アーロンエップラー; トムエイカンプ; リチャードゴットショ; ヨウコヤマグチ; クリスリー; スティーヴリー

Archive | 2015