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Dive into the research topics where Tom Kamp is active.

Publication


Featured researches published by Tom Kamp.


Archive | 2003

Variable temperature processes for tunable electrostatic chuck

Tom Kamp; Richard A. Gottscho; Steve Lee; Chris Lee; Yoko Yamaguchi; Vahid Vahedi; Aaron Eppler


Archive | 2003

Apparatus and method for controlling etch depth

Tom Kamp; Alan J. Miller; Vijayakumar C. Venugopal


Archive | 2014

Controlling cd and cd uniformity with trim time and temperature on a wafer by wafer basis

Yoshie Kimura; Tom Kamp; Eric A. Pape; R. Deshpande; Gowri Kamarthy


Archive | 2010

PLASMA ETCH METHOD TO REDUCE MICRO-LOADING

Tom Kamp; Qian Fu; I. C. Jang; Linda Braly; Shenjian Liu


Archive | 2010

Hardmask trim method

Tom Kamp


Archive | 2010

Variable temperature method for tunable electrostatic chuck

Aaron Eppler; Richard A. Gottscho; Tom Kamp; Chris Lee; Steve Lee; Vahid Vahedi; Yoko Yamaguchi; ヴァヒド ヴァヘディ; アーロン エップラー; トム エイ カンプ; リチャード ゴットショ; ヨウコ ヤマグチ; クリス リー; スティーヴ リー


Archive | 2015

INTEGRATED ETCH/CLEAN FOR DIELECTRIC ETCH APPLICATIONS

Reza Arghavani; Shashank C. Deshmukh; Eric Hudson; Tom Kamp; Samantha Tan; Gerardo Delgadino


Archive | 2017

Self limiting lateral atomic layer etch

Tom Kamp; Neema Rastgar; Michael Carl Drymon


Archive | 2017

GAS PLENUM ARRANGEMENT FOR IMPROVING ETCH NON-UNIFORMITY IN TRANSFORMER-COUPLED PLASMA SYSTEMS

Tom Kamp; Arthur Sato; Alex Paterson


Archive | 2017

SHADOW TRIM LINE EDGE ROUGHNESS REDUCTION

Tom Kamp; Rodolfo P. Belen

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