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Chris Lee

Lam Research

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Publication

Featured researches published by Chris Lee.

Archive | 2003

Variable temperature processes for tunable electrostatic chuck

Tom Kamp; Richard A. Gottscho; Steve Lee; Chris Lee; Yoko Yamaguchi; Vahid Vahedi; Aaron Eppler

Journal of Physics D | 2014

The grand challenges of plasma etching: a manufacturing perspective

Chris Lee; Keren J. Kanarik; Richard A. Gottscho

Archive | 2002

Method of plasma etching organic antireflective coating

Tuqiang Ni; Weinan Jiang; Conan Chiang; Frank Y. Lin; Chris Lee; Dai N. Lee

Archive | 2004

Method to improve profile control and N/P loading in dual doped gate applications

Helene Del Puppo; Frank Y. Lin; Chris Lee; Vahid Vahedi; Thomas A. Kamp; Alan J. Miller; Saurabh Ullal; Harmeet Singh

Archive | 2006

Method for multi-layer resist plasma etch

Yoko Yamaguchi; Chris Lee

Archive | 2005

Method for bilayer resist plasma etch

Wendy Nguyen; Chris Lee

Archive | 2005

Method and compositions for hardening photoresist in etching processes

Yousun Taylor; Wendy Nguyen; Chris Lee

Archive | 2007

Method for hard mask CD trim

C. Robert Koemtzopoulos; Shibu Gangadharan; Chris Lee; Alan J. Miller

Semiconductor international | 2002

Photoresist trimming: Etch solutions to CD uniformity and tuning

Shyam Ramalingam; Chris Lee; Vahid Vahedi

Archive | 2005

Selective etch of films with high dielectric constant

Shyam Ramalingam; Gowri P. Kota; Chris Lee

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Collaboration

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Vahid Vahedi

Lam Research

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Frank Y. Lin

Lam Research

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Yoko Yamaguchi

Lam Research

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Aaron Eppler

Lam Research

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Steve Lee

Lam Research

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Tom Kamp

Lam Research

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Tuqiang Ni

Lam Research

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Weinan Jiang

Lam Research

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Wendy Nguyen

Lam Research

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Richard A. Gottscho

Alcatel-Lucent

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