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Arthur Sato

Lam Research

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Publication

Featured researches published by Arthur Sato.

Archive | 2011

Synchronized and shortened master-slave RF pulsing in a plasma processing chamber

Neil Benjamin; Arthur Sato

Archive | 2008

Apparatus for measuring dielectric properties of parts

Jaehyun Kim; Arthur Sato; Keith Comendant; Qing Liu; Feiyang Wu

Archive | 2014

HYBRID EDGE RING FOR PLASMA WAFER PROCESSING

Brian Mcmillin; Arthur Sato; Neil Benjamin

Archive | 2014

Methods for automatically determining capacitor values and systems thereof

Arthur Sato

Archive | 2012

BYPASS CAPACITORS FOR HIGH VOLTAGE BIAS POWER IN THE MID FREQUENCY RF RANGE

Arthur Sato

Archive | 2010

Current control in plasma processing systems

Maolin Long; Seyed Jafar Jafarian-Tehrani; Arthur Sato; Neil Benjamin; Norman Williams

Archive | 2015

Radiofrequency adjustment for instability management in semiconductor processing

Arthur Sato

Archive | 2014

Determining A Malfunctioning Device in A Plasma System

John C. Valcore; Bradford J. Lyndaker; Arthur Sato

Archive | 2013

System, method and apparatus for RF power compensation in plasma etch chamber

Robert Griffith O'Neill; Arthur Sato; Eric Tonnis; Shang-I Chou

Archive | 2011

Methods for Measuring Dielectric Properties of Parts

Jaehyun Kim; Arthur Sato; Keith Comendant; Qing Liu; Feiyang Wu

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Feiyang Wu

Lam Research

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Jaehyun Kim

Lam Research

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Keith Comendant

Lam Research

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Qing Liu

Lam Research

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Alex Paterson

Lam Research

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Neil Benjamin

Lam Research

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Tom Kamp

Lam Research

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Allan Ronne

Lam Research

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Bradford J. Lyndaker

Lam Research

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Brian Mcmillin

Lam Research

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