Tomio Uno | Researchain

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Featured researches published by Tomio Uno.

Archive | 2004

Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus

Tadahiro Ohmi; Satoshi Kagatsume; Kazuhiko Sugiyama; Yukio Minami; Kouji Nishino; Ryousuke Dohi; Katsunori Yonehana; Nobukazu Ikeda; Michio Yamaji; Jun Hirose; Kazuo Fukazawa; Hiroshi Koizumi; Hideki Nagaoka; Akihiro Morimoto; Tomio Uno; Eiji Ideta; Atsushi Matsumoto; Toyomi Uenoyama; Takashi Hirose

Archive | 1997

Fluid control valve and fluid supply/exhaust system

Tadahiro Ohmi; Migaku Takahashi; Michio Yamaji; Tsuyoshi Tanikawa; Nobukazu Ikeda; Ryosuke Dohi; Kouji Nishino; Naofumi Yasumoto; Hiroyuki Fukuda; Tomio Uno; Yasuyuki Yanai

Archive | 1999

Gas supply equipment with pressure type flow rate control device

Ryousuke Dohi; Eiji Ideta; Nobukazu Ikeda; Satoshi Kagatsume; Kouji Nishino; Tadahiro Ohmi; Tomio Uno; Michio Yamaji; Kazuhiro Yoshikawa

Archive | 2006

INTERNAL PRESSURE CONTROLLER OF CHAMBER AND INTERNAL PRESSURE SUBJECT -TO- CONTROL TYPE CHAMBER

Tadahiro Ohmi; Akinobu Teramoto; Tomio Uno; Ryousuke Dohi; Kouji Nishino; Osamu Nakamura; Atsushi Matsumoto; Masaaki Nagase; Nobukazu Ikeda

Archive | 2002

PRESSURE SENSOR, PRESSURE CONTROLLER AND TEMPERATURE DRIFT CORRECTOR OF PRESSURE TYPE FLOW CONTROLLER

Tadahiro Ohmi; Tomio Uno; Osamu Nakamura; Nobukazu Ikeda; Ryousuke Dohi; Kouji Nishino; Atsushi Matsumoto; Kazuhiko Sugiyama

Archive | 2001

Improved pressure type flow control device

Ryosuke Doi; Shinichi Ikeda; Hidejiro Inui; Senshi Matsumoto; Osamu Nakamura; Koji Nishino; Tadahiro Omi; Taiji Sakai; Kazuhiko Sugiyama; Masayoshi Ueyama; Tomio Uno; 修中村; 秀二郎乾; 亮介土肥; 忠弘大見; 富雄宇野; 一彦杉山; 薦諮松本; 将宜植山; 信一池田; 功二西野; 泰治酒井

Archive | 2001

Method of detecting abnormalities in flow rate in pressure-type flow controller

Tadahiro Ohmi; Seiichi Iida; Satoshi Kagatsume; Jun Hirose; Kazuo Fukasawa; Hiroshi Koizumi; Hideki Nagaoka; Tomio Uno; Kouji Nishino; Nobukazu Ikeda; Ryousuke Dohi; Eiji Ideta

Archive | 1999

Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers

Tadahiro Ohmi; Seiichi Iida; Satoshi Kagatsume; Jun Hirose; Kouji Nishino; Nobukazu Ikeda; Michio Yamaji; Ryousuke Dohi; Kazuhiro Yoshikawa; Mutsunori Koyomogi; Tomio Uno; Eiji Ideta; Takashi Hirose

Archive | 1999