Toshihiro Itoh

Low-power-consumption CO 2 gas sensor using ionic liquids for green energy management

We propose a low-power-consumption CO2 gas sensor using ionic liquids We use ionic liquids of imidazolium salts EMIMBF4 EMIMTFSI and BMIMHFA The impedance of the ionic liquids decreases along with increase of the CO2 gas concentration By measuring the impedance of the ionic liquids we could estimate the CO2 gas concentration of the atmosphere This experiment showed that measurement resolution of our proposed sensor was 100 ppm and the power consumption was several tens of microwatts and this value is 1/1000 smaller than the conventional CO2 gas sensors (NDIR and Solid state electrolyte cell) We expect as a candidate of very low power consumption CO2 sensor suitable for green energy management.

AlN cantilever for differential pressure sensor

The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 μm × 1000 μm × 2 μm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The sensor design was validated by measuring the performance of the sensor, which showed sensitivity of 8.2 mV/Pa from -20 Pa to 20 Pa.