Shinji Iino

Probe apparatus having burn-in test function

Method and apparatus for probe testing substrate

Contactor and production method for contractor

Inspection device for inspecting a semiconductor wafer

Apparatus for examining target objects such as LCD panels

Prober and probe method

Contractor, method for manufacturing the same, and probe card using the same

Inspection method and apparatus for semiconductor integrated circuit, and vacuum contactor mechanism

Inspection method and inspection apparatus

Contactor holding mechanism and automatic change mechanism for contactor