Toshimitsu Kohara

Deposition of α-Al2O3 hard coatings by reactive magnetron sputtering

Process for producing alumina coating composed mainly of alpha-type crystal structure, alumina coating composed mainly of alpha-type crystal structure, laminate coating including the alumina coating, member clad with the alumina coating or laminate coating, process for producing the member, and physical evaporation apparatu

Multilayered film having excellent wear resistance, heat resistance and adhesion to substrate and method for producing the same

Reactive sputtering method and device

Multilayer film formed body

Magnetron sputtering apparatus

Multilayer coating excellent in wear resistance and heat resistance

Process for producing an alumina coating comprised mainly of α crystal structure

Method for producing alpha-alumina layer-formed member and surface treatment

Methods of producing an alumina film mainly in alpha crystal structure and the multilayer film thereof