Toyomi Uenoyama | Researchain

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Featured researches published by Toyomi Uenoyama.

Archive | 2004

Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus

Tadahiro Ohmi; Satoshi Kagatsume; Kazuhiko Sugiyama; Yukio Minami; Kouji Nishino; Ryousuke Dohi; Katsunori Yonehana; Nobukazu Ikeda; Michio Yamaji; Jun Hirose; Kazuo Fukazawa; Hiroshi Koizumi; Hideki Nagaoka; Akihiro Morimoto; Tomio Uno; Eiji Ideta; Atsushi Matsumoto; Toyomi Uenoyama; Takashi Hirose

Archive | 2003

Method for supplying gas while dividing to chamber from gas supply facility equipped with flow controller

Kazuhiko Sugiyama; Nobukazu Ikeda; Kouji Nishino; Ryousuke Dohi; Toyomi Uenoyama

Archive | 2004

Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device

Tadahiro Ohmi; Kazuhiko Sugiyama; Shoichi Hino; Eiji Takahashi; Makoto Saegusa; Nobukazu Ikeda; Kouji Nishino; Ryousuke Dohi; Toyomi Uenoyama; Katsuyuki Sugita

Archive | 2002

Method of dividing flow supply of gas to chamber from gas supply plant equipped with flow-control device

Ryosuke Doi; Shinichi Ikeda; Koji Nishino; Kazuhiko Sugiyama; Toyomi Uenoyama; 上野山豊己; 土肥亮介; 杉山一彦; 池田信一; 西野功二

Archive | 1999

Method for variable fluid flow rate control by flow factor and its device

Ryosuke Doi; Kazuo Fukazawa; Jun Hirose; Takashi Hirose; Eiji Ideta; Shinichi Ikeda; Satoru Kagatsume; Hiroshi Koizumi; Atsushi Matsumoto; Akihiro Morimoto; Hideki Nagaoka; Koji Nishino; Tadahiro Omi; Toyomi Uenoyama; Tomio Uno; Michio Yamaji; 豊己上野山; 英二出田; 哲加賀爪; 亮介土肥; 忠弘大見; 富雄宇野; 浩小泉; 道雄山路; 潤廣瀬; 隆廣瀬; 篤志松本; 明弘森本; 信一池田; 和夫深澤

Archive | 2003

Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control system

Kazuhiko Sugiyama; Nobukazu Ikeda; Kouji Nishino; Ryousuke Dohi; Toyomi Uenoyama

Archive | 2000

Parallel bypass type fluid feeding device, and method and device for controlling fluid variable type pressure system flow rate used for the device

Tadahiro Ohmi; Satoshi Kagatsume; Kazuhiko Sugiyama; Yukio Minami; Kouji Nishino; Ryousuke Dohi; Katsunori Yonehana; Nobukazu Ikeda; Michio Yamaji; Jun Hirose; Kazuo Fukazawa; Hiroshi Koizumi; Hideki Nagaoka; Akihiro Osaka-shi Morimoto; Tomio Uno; Eiji Ideta; Atsushi Matsumoto; Toyomi Uenoyama; Takashi Hirose

Archive | 2013