Trevor Lafleur

Direct thrust measurement of a permanent magnet helicon double layer thruster

Direct thrust measurements of a permanent magnet helicon double layer thruster have been made using a pendulum thrust balance and a high sensitivity laser displacement sensor. At the low pressures used (0.08 Pa) an ion beam is detected downstream of the thruster exit, and a maximum thrust force of about 3 mN is measured for argon with an rf input power of about 700 W. The measured thrust is proportional to the upstream plasma density and is in good agreement with the theoretical thrust based on the maximum upstream electron pressure.

Simulation benchmarks for low-pressure plasmas: Capacitive discharges

Benchmarking is generally accepted as an important element in demonstrating the correctness of computer simulations. In the modern sense, a benchmark is a computer simulation result that has evidence of correctness, is accompanied by estimates of relevant errors, and which can thus be used as a basis for judging the accuracy and efficiency of other codes. In this paper, we present four benchmark cases related to capacitively coupled discharges. These benchmarks prescribe all relevant physical and numerical parameters. We have simulated the benchmark conditions using five independently developed particle-in-cell codes. We show that the results of these simulations are statistically indistinguishable, within bounds of uncertainty that we define. We, therefore, claim that the results of these simulations represent strong benchmarks, which can be used as a basis for evaluating the accuracy of other codes. These other codes could include other approaches than particle-in-cell simulations, where benchmarking could examine not just implementation accuracy and efficiency, but also the fidelity of different physical models, such as moment or hybrid models. We discuss an example of this kind in the Appendix. Of course, the methodology that we have developed can also be readily extended to a suite of benchmarks with coverage of a wider range of physical and chemical phenomena.

Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

Through the use of particle-in-cell simulations, we demonstrate that the power deposition in capacitively coupled discharges (in argon) can be increased by replacing sinusoidal waveforms with Gaussian-shaped voltage pulses (with a repetition frequency of 13.56 MHz). By changing the Gaussian pulse width, electron heating can be directly controlled, allowing for an increased plasma density and ion flux for the same gas pressure and geometrical operating conditions. Analysis of the power deposition profiles and electron distribution functions shows that enhanced electron-sheath heating is responsible for the increased power absorption.

Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring

We experimentally characterize an argon plasma in a geometrically symmetric, capacitively coupled rf discharge, excited by pulse-type tailored waveforms (generated using multiple voltage harmonics). The results confirm a number of predictions made by recent particle-in-cell simulations of a similar system and demonstrate a unique form of control over the ion flux and ion energy in capacitively coupled plasmas; by increasing the number of applied harmonics (equivalent to decreasing the pulse width), it is possible to increase the plasma density and ion flux (together with the power deposition) while keeping the average ion energy on one of the electrodes low and constant.

Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms

Using particle-in-cell simulations we perform a characterization of the ion flux and ion energy in a capacitively coupled rf plasma reactor excited with non-sinusoidal voltage waveforms. The waveforms used are positive Gaussian type pulses (with a repetition frequency of 13.56?MHz), and as the pulse width is decreased, three main effects are identified that are not present in typical symmetric sinusoidal discharges: (1) the ion flux (and plasma density) rapidly increases, (2) as the pressure increases a significant asymmetry in the ion fluxes to the powered and grounded electrodes develops and (3) the average ion energy on the grounded electrode cannot be made arbitrarily small, but in fact remains essentially constant (together with the bias voltage) for the pressures investigated (20?500?mTorr). Effects (1) and (3) potentially offer a new form of control in these types of rf discharges, where the ion flux can be increased while keeping the average ion energy on the grounded electrode constant. This is in contrast with the opposite control mechanism recently identified in Donk? et al (2009 J. Phys. D: Appl. Phys. 42 025205), where by changing the phase angle between applied voltage harmonics the ion flux can be kept constant while the ion energy (and bias voltage) varies.

Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

Using a range of different diagnostics we have performed a detailed experimental characterization of a capacitively coupled rf plasma discharge excited by tailored voltage waveforms in argon (3–13 Pa). The applied pulse-type tailored waveforms consist of between 1 and 5 harmonics (with a fundamental of 15 MHz), and are used to generate an electrically asymmetric plasma response, manifested by the formation of a strong dc bias in the geometrically symmetric reactor used. Experimental measurements of the dc bias, electron density, ion current density, ion-flux energy distributions at the electrodes and discharge current waveforms, are compared with a one-dimensional particle-in-cell simulation for the same operating conditions. The experimental and simulation results are found to be in good agreement over the range of parameters investigated, and demonstrate a number of unique features present with pulse-type tailored waveforms, including: increased plasma density and ion flux with the number of harmonics, and a broader control range of the ion bombarding energy.

Characterization of a helicon plasma source in low diverging magnetic fields

A detailed experimental characterization has been performed of a helicon mode in low nonuniform magnetic fields (B0 1017 m−3) is more than an order of magnitude larger than that before or after, and is associated with a corresponding peak in the measured antenna resistance, thus showing a larger percentage of the input power is deposited within the plasma.

Electron heating in capacitively coupled plasmas revisited

We revisit the problem of electron heating in capacitively coupled plasmas (CCPs), and propose a method for quantifying the level of collisionless and collisional heating in plasma simulations. The proposed procedure, based on the electron mechanical energy conservation equation, is demonstrated with particle-in-cell simulations of a number of single and multi-frequency CCPs operated in regimes of research and industrial interest. In almost all cases tested, the total electron heating is comprised of collisional (ohmic) and pressure heating parts. This latter collisionless component is in qualitative agreement with the mechanism of electron heating predicted from the recent re-evaluation of theoretical models. Finally, in very electrically asymmetric plasmas produced in multi-frequency discharges, we observe an additional collisionless heating mechanism associated with electron inertia.

Particle-in-cell simulations of hollow cathode enhanced capacitively coupled radio frequency discharges

A two-dimensional particle-in-cell simulation has been developed to study density enhancement of capacitively coupled rf discharges with multi-slit electrodes. The observed density increase is shown to result from a hollow cathode effect that takes place within the multi-slit electrode configuration, which forms as a result of secondary electron emission due to ion bombardment. By investigating the ionization and power deposition profiles, it is found that rf sheath heating is too weak to sustain the discharge, and that secondary electron acceleration within the sheath is the primary heating mechanism. Due to a capacitive voltage divider formed by the rf sheaths at each electrode, the area ratio of the powered and ground electrodes is observed to have a strong effect on the resulting discharge, and if the ground electrode area is too small, the voltage drop at the powered electrode is too low to sustain a hollow cathode discharge.

Direct thrust measurements and modelling of a radio-frequency expanding plasma thruster

It is shown analytically that the thrust from a simple plasma thruster (in the absence of a magnetic field) is given by the maximum upstream electron pressure, even if the plasma diverges downstream. Direct thrust measurements of a thruster are then performed using a pendulum thrust balance and a laser displacement sensor. A maximum thrust of about 2 mN is obtained at 700 W for a thruster length of 17.5 cm and a flow rate of 0.9 mg s−1, while a larger thrust of 4 mN is obtained at a similar power for a length of 9.5 cm and a flow rate of 1.65 mg s−1. The measured thrusts are in good agreement with the maximum upstream electron pressure found from measurements of the plasma parameters and in fair agreement with a simple global approach used to model the thruster.