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Tsu Shih

TSMC

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Publication

Featured researches published by Tsu Shih.

Archive | 1999

Method to prevent copper CMP dishing

Tsu Shih; Ying-Ho Chen; Jih-Churng Twu

Archive | 1999

Method for forming a self-aligned copper structure with improved planarity

Tsu Shih; Ying-Ho Chen; Jih-Churng Twu; Syun-Ming Jang

Archive | 2001

Slurry dispenser having multiple adjustable nozzles

Wen-Chih Chiou; Ying-Ho Chen; Tsu Shih; Syun-Ming Jang

Archive | 1999

Apparatus and method for chemical mechanical polishing metal on a semiconductor wafer

Tien-Chen Hu; Jih-Churng Twu; Ying-Ho Chen; Tsu Shih

Archive | 2000

Elimination of electrochemical deposition copper line damage for damascene processing

Ying-Ho Chen; Syun-Ming Jang; Jih-Churng Twu; Tsu Shih

Archive | 1999

Method to remove residue in wolfram CMP

Tsu Shih; Jih-Churng Twu

Archive | 1999

Reduction of Cu line damage by two-step CMP

Shau-Lin Shue; Minghsing Tsai; Wen-Jye Tsai; Ying-Ho Chen; Tsu Shih; Jih-Churng Twu; Syun-Ming Jang

Archive | 2001

Eliminate broken line damage of copper after CMP

Shau-Lin Shue; Ying-Ho Chen; Wen-Chih Chiou; Tsu Shih; Syun-Ming Jang

Archive | 1999

Use of low-high slurry flow to eliminate copper line damages

Jih-Churng Twu; Ying-Ho Chen; Tsu Shih; Syun-Ming Jang

Archive | 2000

Method and apparatus for preventing metal corrosion during chemical mechanical polishing

Ying-Ho Chen; Wen-Chih Chiou; Tsu Shih; Syun-Ming Jang; Chia-Ming Yang

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Ying-Ho Chen

TSMC

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Syun-Ming Jang

TSMC

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Jih-Churng Twu

TSMC

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Wen-Chih Chiou

TSMC

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Shau-Lin Shue

TSMC

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Chi-Wei Chung

TSMC

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Chia-Ming Yang

TSMC

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Minghsing Tsai

TSMC

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Tien-Chen Hu

TSMC

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Wen-Jye Tsai

TSMC

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