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Syun-Ming Jang

TSMC

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Publication

Featured researches published by Syun-Ming Jang.

Archive | 1997

Shallow trench isolation (STI) method employing gap filling silicon oxide dielectric layer

Syun-Ming Jang; Ying-Ho Chen; Chen-Hua Yu

Archive | 1997

Shallow trench isolation method

Syun-Ming Jang; Ying-Ho Chen; Chen-Hua Yu

Archive | 1996

Self-aligned polish stop layer hard masking method for forming planarized aperture fill layers

Syun-Ming Jang; Ying-Ho Chen; Chen-Hua Yu

Archive | 1998

Method of photo alignment for shallow trench isolation chemical-mechanical polishing

Syun-Ming Jang; Ying-Ho Chen; Jui-Yu Chang; Chen-Hua Yu

Archive | 1997

Shallow trench isolation method employing self-aligned and planarized trench fill dielectric layer

Syun-Ming Jang; Ying-Ho Chen; Chen-Hua Yu

Archive | 1996

Method of fabricating a readable alignment mark structure using enhanced chemical mechanical polishing

Syun-Ming Jang; Ying-Ho Chen; Chung-Long Chang; Chen-Hua Yu

Archive | 1997

Self-aligned sacrificial oxide for shallow trench isolation

Syun-Ming Jang; Ying-Ho Chen; Chen-Hua Yu

Archive | 1997

Gap-filling of O3-TEOS for shallow trench isolation

Syun-Ming Jang; Ying-Ho Chen; Chen-Hua Yu

Archive | 1997

Trench filling method employing oxygen densified gap filling silicon oxide layer formed with low ozone concentration

Syun-Ming Jang; Ying-Ho Chen; Chen-Hua Yu

Archive | 1999

Reduction of surface defects on amorphous silicon grown by a low-temperature, high pressure LPCVD process

Jih-Churng Twu; Syun-Ming Jang; Chen-Hua Yu

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Collaboration

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Ying-Ho Chen

TSMC

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Chen-Hua Yu

TSMC

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Tsu Shih

TSMC

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Jih-Churng Twu

TSMC

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Wen-Chih Chiou

TSMC

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Chung-Long Chang

TSMC

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Chi-Wei Chung

TSMC

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Chu-Yun Fu

TSMC

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Jui-Yu Chang

TSMC

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Shwang-Ming Jeng

TSMC

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