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Jih-Churng Twu

TSMC

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Publication

Featured researches published by Jih-Churng Twu.

Archive | 1998

Lightly nitridation surface for preparing thin-gate oxides

Shau-Lin Shue; Jih-Churng Twu

Archive | 1999

Method to prevent copper CMP dishing

Tsu Shih; Ying-Ho Chen; Jih-Churng Twu

Archive | 1999

Reduction of surface defects on amorphous silicon grown by a low-temperature, high pressure LPCVD process

Jih-Churng Twu; Syun-Ming Jang; Chen-Hua Yu

Archive | 1999

Method for forming a self-aligned copper structure with improved planarity

Tsu Shih; Ying-Ho Chen; Jih-Churng Twu; Syun-Ming Jang

Archive | 2001

Multilayer interface in copper CMP for low K dielectric

Ying-Ho Chen; Jih-Churng Twu; Weng Chang

Archive | 2000

Method for cleaning semiconductor wafers with ozone-containing solvent

Jih-Churng Twu; Rong-Hui Kao; Chia-Chun Cheng

Archive | 1999

Apparatus and method for chemical mechanical polishing metal on a semiconductor wafer

Tien-Chen Hu; Jih-Churng Twu; Ying-Ho Chen; Tsu Shih

Archive | 1999

Amorphous silicon gate with mismatched grain-boundary microstructure

Chen-Hua Yu; Jih-Churng Twu

Archive | 2000

Elimination of electrochemical deposition copper line damage for damascene processing

Ying-Ho Chen; Syun-Ming Jang; Jih-Churng Twu; Tsu Shih

Archive | 1999

Method to remove residue in wolfram CMP

Tsu Shih; Jih-Churng Twu

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Syun-Ming Jang

TSMC

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Ying-Ho Chen

TSMC

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Tsu Shih

TSMC

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Chia-Chun Cheng

TSMC

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Chen-Hua Yu

TSMC

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Ming-Dar Guo

TSMC

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Wei-Ming You

TSMC

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Ching-Shan Lu

TSMC

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Kuo-Bin Huang

TSMC

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Rong-Hui Kao

TSMC

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