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Tsuneo Numanami

Shin-Etsu Chemical

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Publication

Featured researches published by Tsuneo Numanami.

Archive | 2001

Phase shift mask blank, phase shift mask, and method of manufacture

Yukio Inazuki; Masayuki Nakatsu; Tsuneo Numanami; Atsushi Tajika; Hideo Kaneko; Satoshi Okazaki

Archive | 2004

Photomask blank substrate, photomask blank and photomask

Masayuki Nakatsu; Tsuneo Numanami; Masayuki Mogi; Masamitsu Itoh; Tsuneyuki Hagiwara; Naoto Kondo

Archive | 2005

Substrate for photomask blank, photomask blank, and photomask

Tsuneyuki Hagiwara; Masamitsu Ito; Naohito Kondo; Tadayuki Mogi; Masayuki Nakatsu; Tsuneo Numanami; 正幸 中津; 正光 伊藤; 恒夫 沼波; 均之 茂木; 恒幸 萩原; 尚人 近藤

Archive | 2004

Method of selecting photomask blank substrates

Masayuki Nakatsu; Tsuneo Numanami; Masayuki Mogi; Tsuneyuki Hagiwara; Naoto Kondo

Archive | 2003

Phase shifting mask blank, phase shifting mask and method for producing those

Sadaomi Inazuki; Hideo Kaneko; Masayuki Nakatsu; Tsuneo Numanami; Satoshi Okazaki; Atsushi Tajika; 正幸 中津; 智 岡崎; 恒夫 沼波; 篤 田鹿; 判臣 稲月; 英雄 金子

Archive | 2005

METHOD FOR SELECTING SUBSTRATE FOR PHOTOMASK BLANK

Tsuneyuki Hagiwara; Naohito Kondo; Tadayuki Mogi; Masayuki Nakatsu; Tsuneo Numanami; 正幸 中津; 恒夫 沼波; 均之 茂木; 恒幸 萩原; 尚人 近藤

Archive | 2004

Method of making photomask blank substrates

Tsuneo Numanami; Masayuki Nakatsu; Masayuki Mogi; Tsuneyuki Hagiwara; Naoto Kondo

Archive | 2003

Method for manufacturing substrate for photomask blank

Tsuneyuki Hagiwara; Naohito Kondo; Tadayuki Mogi; Masayuki Nakatsu; Tsuneo Numanami; 正幸 中津; 恒夫 沼波; 均之 茂木; 恒幸 萩原; 尚人 近藤

Archive | 2009

Method for cleaning photomask-related substrate, cleaning method, and cleaning fluid supplying apparatus

Tsuneo Numanami

Archive | 2017

SUBSTRATE CLEANING APPARATUS AND METHOD FOR CLEANING SUBSTRATE FOR SUBSTRATE RELATED TO PHOTOMASK

Tsuneo Numanami; Yukio Inazuki; Toyohisa Sakurada

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Masayuki Nakatsu

Shin-Etsu Chemical

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Tsuneyuki Hagiwara

Nikon

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Masayuki Mogi

Shin-Etsu Chemical

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Naoto Kondo

Nikon

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Masamitsu Itoh

Toshiba

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Hideo Kaneko

Shin-Etsu Chemical

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Satoshi Okazaki

Shin-Etsu Chemical

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Yukio Inazuki

East Tennessee State University

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Toyohisa Sakurada

Shin-Etsu Chemical

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Yukio Inazuki

East Tennessee State University

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