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Ulrich Schoenhoff

Carl Zeiss AG

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Publication

Featured researches published by Ulrich Schoenhoff.

Archive | 2009

Optical element and method

Eric Eva; Payam Tayebati; Michael Thier; Markus Hauf; Ulrich Schoenhoff; Ole Fluegge; Arif Kazi; Alexander Sauerhoefer; Gerhard Focht; Jochen Weber; Toralf Gruner

Archive | 2010

Optical correction device

Markus Hauf; Ulrich Schoenhoff; Payam Tayebati; Michael Thier; Tilmann Heil; Ole Fluegge; Arif Kazi; Alexander Sauerhoefer; Gerhard Focht; Jochen Weber; Toralf Gruner; Aksel Goehnermeier; Dirk Hellweg

Archive | 2008

Controllable optical element and method for operating an optical element with thermal actuators and projection exposure apparatus for semiconductor lithography

Markus Hauf; Ulrich Schoenhoff; Payam Tayebati; Michael Thier; Tilmann Heil; Ole Fluegge; Arif Kazi; Alexander Sauerhoefer; Gerhard Focht; Jochen Weber; Toralf Gruner; Aksel Goehnermeier; Dirk Hellweg

Archive | 2014

Arrangement for actuating an element in a microlithographic projection exposure apparatus

Sascha Bleidistel; Ulrich Schoenhoff; Juergen Fischer

Archive | 2013

ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT

Michael Erath; Florian Bach; Ulrich Schoenhoff; Rodolfo Rabe; Norbert Muehlberger; Dirk Eicher; Jasper Wesselingh

Archive | 2012

Anordnung zur Aktuierung eines Elementes in einer mikrolithographischen Projektionsbelichtungsanlage

Jürgen Fischer; Ulrich Schoenhoff; Bernhard Geuppert; Hans Butler; Robertus Johannes Marinus De Jongh

Archive | 2012

Arrangement for actuating an element in a projection exposure apparatus

Markus Hauf; Ulrich Schoenhoff

Archive | 2016

MECHANISM FOR OPERATING ELEMENT OF MICROLITHOGRAPHIC PROJECTION EXPOSURE DEVICE

Sascha Bleidistel; Ulrich Schoenhoff; Fischer Juergen

Archive | 2013

Arrangement for mounting an optical element, in particular in an euv projection exposure apparatus

Bernhard Geuppert; Rodolfo Rabe; Ulrich Schoenhoff

Archive | 2016

Arrangement for manipulating the position of an element, in particular in an optical system

Ulrich Schoenhoff; Eylem Bektas; Markus Hauf

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Collaboration

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Markus Hauf

Carl Zeiss AG

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Alexander Sauerhoefer

Carl Zeiss AG

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Gerhard Focht

Carl Zeiss AG

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Jochen Weber

Carl Zeiss AG

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Michael Thier

Carl Zeiss AG

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Ole Fluegge

Carl Zeiss AG

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Payam Tayebati

Carl Zeiss AG

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Toralf Gruner

Carl Zeiss AG

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Arif Kazi

Augsburg College

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Bernhard Geuppert

Carl Zeiss AG

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