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Umezaki Yoji

Kyushu University

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Publication

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Journal of Advanced Mechanical Design Systems and Manufacturing | 2011

Wear-Resistance of Coating Films on Hob Cutting Teeth (Intermittent Cutting Tests with a Flytool)

Umezaki Yoji; 梅崎 洋二; 舟木 義行; Funaki Yoshiyuki; 黒河 周平; Kurokawa Syuhei; Ohnishi Osamu; 大西 修; 土肥 俊郎; Doi Toshiro

Transactions of the Japan Society of Mechanical Engineers. C | 1991

Finish Hobbing of Medium Hardness Gears with Cermet-Tipped Hobs : Tooth Surface Finishing with the Cutting Edges Having 0 Degree Relief Angle Lands

Ariura Yasutsune; 有浦 泰常; 梅崎 洋二; Umezaki Yoji; Hyodo Kenji; 兵頭 健司; Nara Hyakuro; 奈良 百郎; 島村 寛治; Shimamura Kanji

日本機械学会九州支部講演論文集 | 2010

310 Si単結晶の各種結晶方位面のCMP加工特性とPoly-Si基板の超精密平坦化CMPの検討(GS 生産加工I)

Yosiura Shinichi; 吉浦 慎一; 土肥 俊郎; Doi Toshiro; 黒河 周平; Kurokawa Syuhei; 梅崎 洋二; Umezaki Yoji; 山崎 努; Yamazaki Tsutomu; Shinya Naofumi; 新谷 尚史

The Proceedings of Conference of Kyushu Branch | 2010

310 CMP characteristic on crystal orientations of single-crystal Si and high-precision planarization CMP of Poly-Si

吉浦 慎一; Yosiura Shinichi; 土肥 俊郎; Doi Toshiro; Kurokawa Syuhei; 黒河 周平; 梅崎 洋二; Umezaki Yoji; 山崎 努; Yamazaki Tsutomu; Shinya Naofumi; 新谷 尚史

The Proceedings of Conference of Kyushu Branch | 2010

315 Trial manufacturing of an inner atmosphere-controllable, sealed container-type double-side CMP machine and its polishing ability

Kitamura Kei; 北村 圭; 土肥 俊郎; Doi Toshiro; 黒河 周平; Kurokawa Syuhei; 梅崎 洋二; Umezaki Yoji; 松川 洋二; Matsukawa Yoji; 山崎 努; Yamazaki Tsutomu; 大木 洋太; Ooki Yota; 長谷川 正; Hasegawa Tadashi; Koshiyama Isamu; 越山 勇; Ichikawa Koichiro; 市川 浩一郎

The Proceedings of Conference of Kyushu Branch | 2010

320 Quantitative Evaluation Method for Conditioning Characteristics of CMP Pad

Akama Taro; 赤間 太郎; 黒河 周平; Kurokawa Syuhei; 土肥 俊郎; Doi Toshiro; 梅崎 洋二; Umezaki Yoji; 松川 洋二; Matsukawa Yoji; 門村 和徳; Kadomura Kazunori; Yoshioka Tetsunori; 吉岡 哲則; Yamada Yohei; 山田 洋平

The Proceedings of Conference of Kyushu Branch | 2010

316 Cu-CMP process by controlled atmosphere polishing machine with carbon dioxide

大木 洋太; Oki Yota; 土肥 俊郎; Doi Toshiro; Kurokawa Shuhei; 黒河 周平; 梅崎 洋二; Umezaki Yoji; 松川 洋二; Matsukawa Yoji; 北村 圭; Kitamura Kei; Koshiyama Isamu; 越山 勇

日本機械学会九州支部講演論文集 | 2009

H24 フュームドシリカスラリーによる層間絶縁膜CMPにおける粗大砥粒とマイクロスクラッチの関係 : マイクロスクラッチ観察法の検討について(H2 加工(CMP-2))

Itou Yoshihiko; 伊藤 吉彦; 土肥 俊郎; Doi Toshiro; 河野 博之; Kouno Hiroyuki; 黒河 周平; Kurokawa Syuhei; 梅崎 洋二; Umezaki Yoji; Matsukawa Yoji; 松川 洋二

日本機械学会九州支部講演論文集 | 2009

H23 密閉型CMPシステムによるCu-CMPとその加工モデルの提案(H2 加工(CMP-2))

Oki Youta; 大木 洋太; 土肥 俊郎; Doi Toshiro; 黒河 周平; Kurokawa Syuhei; 梅崎 洋二; Umezaki Yoji; 松川 洋二; Matsukawa Yoji; 河野 博之; Kihara Takeharu; 木原 丈晴

The Proceedings of Conference of Kyushu Branch | 2009

H22 Processing of functionality material by processing atmosphere control

Kihara Takeharu; 木原 丈晴; 土肥 俊郎; Doi Toshiro; 黒河 周平; Kurokawa Syuhei; 梅崎 洋二; Umezaki Yoji; 松川 洋二; Matsukawa Yoji; Koshiyama Isamu; 越山 勇

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梅崎 洋二

Kyushu University

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黒河 周平

Kyushu University

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Doi Toshiro

Kyushu University

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土肥 俊郎

Kyushu University

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Kurokawa Syuhei

Kyushu University

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Ariura Yasutsune

Kyushu University

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Matsukawa Yoji

Kyushu University

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有浦 泰常

Kyushu University

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松川 洋二

Kyushu University

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Kurokawa Shuhei

Kyushu University

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