Utku Baran

MEMS Laser Scanners: A Review

Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medical-imaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review.

Resonant PZT MEMS Scanner for High-Resolution Displays

A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at the mechanical resonance frequency of 40 kHz provides an optical scan angle of 38.5° for the 1.4-mm-wide mirror. This scanner is a significant step toward achieving full-high-definition resolution (1920 × 1080 pixels) in mobile laser projectors without the use of vacuum packaging. The reported piezoscanner requires no bulky components and consumes <; 30-mW power at maximum deflection, thus providing significant power and size advantages, compared with reported electromagnetic and electrostatic scanners. Interferometry measurements show that the dynamic deformation is at acceptable levels for a large fraction of the mirror and can be improved further for diffraction-limited performance at full resolution. A design variation with a segmented electrode pair illustrated that reliable angle sensing can be achieved with PZT for closed-loop control of the scanner.

Vasodynamics of pial and penetrating arterioles in relation to arteriolo-arteriolar anastomosis after focal stroke.

Abstract. Changes in blood perfusion in highly interconnected pial arterioles provide important insights about the vascular response to ischemia within brain. The functional role of arteriolo-arteriolar anastomosis (AAA) in regulating blood perfusion through penetrating arterioles is yet to be discovered. We apply a label-free optical microangiography (OMAG) technique to evaluate the changes in vessel lumen diameter and red blood cell velocity among a large number of pial and penetrating arterioles within AAA abundant region overlaying the penumbra in the parietal cortex after a middle cerebral artery occlusion (MCAO). In comparison with two-photon microscopy, the OMAG technique makes it possible to image a large number of vessels in a short period of time without administering exogenous contrast agents during a time-constrained MCAO experiment. We compare vasodynamics in penetrating arterioles at various locations. The results show that the MCA connected penetrating arterioles close to a strong AAA dilate, while those belonging to a region away from AAAs constrict in various degrees. These results suggest AAAs play a major role in supporting the active dilation of the penetrating arterioles, thus compensating a significant amount of blood to the ischemic region, whereas the poor blood perfusion occurs at the regions away from AAA connections, leading to ischemia.

Application of thinned-skull cranial window to mouse cerebral blood flow imaging using optical microangiography.

In vivo imaging of mouse brain vasculature typically requires applying skull window opening techniques: open-skull cranial window or thinned-skull cranial window. We report non-invasive 3D in vivo cerebral blood flow imaging of C57/BL mouse by the use of ultra-high sensitive optical microangiography (UHS-OMAG) and Doppler optical microangiography (DOMAG) techniques to evaluate two cranial window types based on their procedures and ability to visualize surface pial vessel dynamics. Application of the thinned-skull technique is found to be effective in achieving high quality images for pial vessels for short-term imaging, and has advantages over the open-skull technique in available imaging area, surgical efficiency, and cerebral environment preservation. In summary, thinned-skull cranial window serves as a promising tool in studying hemodynamics in pial microvasculature using OMAG or other OCT blood flow imaging modalities.

Capillary blood flow imaging within human finger cuticle using optical microangiography

We report non-invasive 3D imaging of capillary blood flow within human finger cuticle by the use of Doppler optical microangiography (DOMAG) and ultra-high sensitive optical microangiography (UHS-OMAG) techniques. Wide velocity range DOMAG method is applied to provide red blood cell (RBC) axial velocity mapping in capillary loops with ranges of ±0.9 mm/s and ±0.3 mm/s. Additionally, UHS-OMAG technique is engineered to acquire high resolution image of capillary morphology. The presented results are promising to facilitate clinical trials of treatment and diagnosis of various diseases such as diabetes, Raynauds phenomenon, and connective tissue diseases by quantifying cutaneous blood flow changes within human finger cuticle.

Review of optical coherence tomography based angiography in neuroscience

Abstract. The brain is a complex ecosystem, consisting of multiple layers and tissue compartments. To facilitate the understanding of its function and its response to neurological insults, a fast in vivo imaging tool with a micron-level resolution, which can provide a field of view at a few millimeters, is desirable. Optical coherence tomography (OCT) is a noninvasive method for imaging three-dimensional biological tissues with high resolution (∼10  μm) and without a need for contrast agents. Recent development of OCT-based angiography has started to shed some new light on cerebral hemodynamics in neuroscience. We give an overview of the recent developments of OCT-based imaging techniques for neuroscience applications in rodents. We summarize today’s technological alternatives for OCT-based angiography for neuroscience and provide a discussion of challenges and opportunities. Moreover, a summary of OCT angiography studies for stroke, traumatic brain injury, and subarachnoid hemorrhage cases on rodents is provided.

High resolution imaging of acne lesion development and scarring in human facial skin using OCT-based microangiography

Acne is a common skin disease that often leads to scarring. Collagen and other tissue damage from the inflammation of acne give rise to permanent skin texture and microvascular changes. In this study, we demonstrate the capabilities of optical coherence tomography‐based microangiography in detecting high‐resolution, three‐dimensional structural, and microvascular features of in vivo human facial skin during acne lesion initiation and scar development.

High frequency torsional MEMS scanner for displays

A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant power and size advantages compared to electromagnetically and electrostatically actuated scanners. This scanner is a significant step towards achieving full HD resolution with mobile laser projectors.

In vivo blood flow imaging of inflammatory human skin induced by tape stripping using optical microangiography

Vasculature response is a hallmark for most inflammatory skin disorders. Tape stripping on human skin causes a minor inflammation which leads to changes in microvasculature. In this study, optical microangiography (OMAG), noninvasive volumetric microvasculature in vivo imaging method, has been used to track the vascular responses after tape stripping. Vessel density has been quantified and used to correlate with the degree of skin irritation. The proved capability of OMAG technique in visualizing the microvasculature network under inflamed skin condition can play an important role in clinical trials of treatment and diagnosis of inflammatory skin disorders.

Intervolume analysis to achieve four-dimensional optical microangiography for observation of dynamic blood flow

Abstract. We demonstrate in vivo volumetric optical microangiography at ∼200  volumes/s by the use of 1.6 MHz Fourier domain mode-locking swept source optical coherence tomography and an effective 36 kHz microelectromechanical system (MEMS) scanner. We propose an intervolume analysis strategy to contrast the dynamic blood flow signal from the static tissue background. The proposed system is demonstrated by imaging cerebral blood flow in mice in vivo. For the first time, imaging speed, sensitivity, and temporal resolution become possible for a direct four-dimensional observation of microcirculations within live body parts.