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Uwe Schellhorn

Carl Zeiss AG

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Publication

Featured researches published by Uwe Schellhorn.

Archive | 2004

Moiré method and measuring system for measuring the distortion of an optical imaging system

Ulrich Wegmann; Uwe Schellhorn; Ralph Klaesges; Joachim Stuehler

Archive | 2003

Device and method for the optical measurement of an optical system, a container therefor, and a microlithography projection exposure machine

Ulrich Wegmann; Uwe Schellhorn; Joachim Stuehler; Helmut Haidner; Albrecht Ehrmann; Martin Schriever; Markus Gobppert

Archive | 2008

Vorrichtung und Verfahren zum Messen der Position von Marken auf einer Maske

Gerd Klose; Michael Arnz; Albecht Hof; Helmut Krause; Ulrich Dr. Strößner; Matthias Manger; Uwe Schellhorn; Karl-Heinz Bechstein

Archive | 2007

Method for determination of residual errors

Uwe Schellhorn; Matthias Manger

Proceedings of SPIE, the International Society for Optical Engineering | 2009

Calibration strategies for precision stages in state-of-the-art registration metrology

Alexander Huebel; Uwe Schellhorn; Michael Arnz; Gerd Klose; Dirk Beyer

Archive | 2009

Device and method for the optical measurement of an optical system by using an immersion fluid

Ulrich Wegmann; Uwe Schellhorn; Joachim Stuehler; Albrecht Ehrmann; Martin Schriever; Markus Goeppert; Helmut Haidner

Archive | 2005

Method for determining distortion and/or image surface

Wolfgang Emer; Uwe Schellhorn; Manfred Dahl; Rainer Hoch

Archive | 2005

Calibrating method, measuring method, optical measuring device and operating method for a transmitter arrangement

Uwe Schellhorn; Matthias Manger; Michael Keil; Wolfgang Emer

Archive | 2008

APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK

Gerd Klose; Michael Arnz; Albrecht Hof; Helmut Krause; Ulrich Stroessner; Matthias Manger; Uwe Schellhorn; Karl-Heinz Bechstein

Archive | 2010

METHOD FOR CALIBRATING A SPECIMEN STAGE OF A METROLOGY SYSTEM AND METROLOGY SYSTEM COMPRISING A SPECIMEN STAGE

Alexander Huebel; Matthias Manger; Gerd Klose; Uwe Schellhorn; Michael Arnz

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Collaboration

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Matthias Manger

Carl Zeiss AG

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Gerd Klose

Carl Zeiss AG

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Michael Arnz

Carl Zeiss AG

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Joachim Stuehler

Carl Zeiss AG

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Helmut Krause

Carl Zeiss AG

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Karl-Heinz Bechstein

Carl Zeiss AG

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Ulrich Wegmann

Carl Zeiss AG

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Wolfgang Emer

Carl Zeiss AG

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Albecht Hof

Carl Zeiss AG

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Albrecht Ehrmann

Carl Zeiss AG

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