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Virinder Grewal

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Publication

Featured researches published by Virinder Grewal.

Archive | 1987

Method for generating contact holes with beveled sidewalls in intermediate oxide layers

Virinder Grewal

Archive | 1995

Formation of self-aligned overlapping bitline contacts with sacrificial polysilicon fill-in stud

Virinder Grewal; Bernhard Poschenrieder

Archive | 1989

Anisotropic dry etching of aluminium (alloy) circuits - using plasma of chlorine, nitrogen and argon

Virinder Grewal; Hans Raske

Archive | 1982

Method for manufacturing solderable, temperable, thin film tracks which do not contain precious metal

Virinder Grewal; Werner Reindl

Archive | 1988

Method for producing contact holes with sloping walls in intermediate oxide layers.

Virinder Grewal; Peter Dipl.-Ing. Mokrisch; Hans-Peter Dr.Rer.Nat. Erb

Archive | 1989

Method for the global planarisation of surfaces for integrated semiconductor circuits

Virinder Grewal; Klaus-Dieter Dipl.-Ing. Menz; Ronald Dr.Rer.Nat. Huber

Archive | 1987

Method of planarizing inorganic insulating layers for use as intermediate insulating layers in multilevel interconnections

Hansjörg Dr. Fritzsche; Virinder Grewal

Archive | 1987

Method for filling contact holes etched in an insulating layer, with tungsten, for the manufacture of highly integrated semi-conductor circuits.

Virinder Grewal; Klaus Koller

Archive | 1997

Method for etching an Al metallization by a C12/HC1 based plasma

Stuart M. Burns; Rosemary Christie; Virinder Grewal; Munir D. Naeem

Archive | 1996

Method of forming self-aligned contact holes using a sacrificial polysilicon layer

Virinder Grewal; Bernhard Poschenrieder

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Werner Reindl

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Bernhard Poschenrieder

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Klaus-Dieter Dipl.-Ing. Menz

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Ronald Dr.Rer.Nat. Huber

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Thomas Morgenstern

Infineon Technologies

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Hansjörg Dr. Fritzsche

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Jens Stolze

Infineon Technologies

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Siegfried Schwarzl

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Bruno Spuler

IBM

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Hans Raske

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