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William A. Stanton

Micron Technology

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Publication

Featured researches published by William A. Stanton.

21st Annual BACUS Symposium on Photomask Technology | 2002

ArF (193-nm) alternating aperture PSM quartz defect repair and printability for 100-nm node

Jerry Xiaoming Chen; John Riddick; Matt J. Lamantia; Azeddine Zerrade; Robert K. Henderson; Greg P. Hughes; Cyrus E. Tabery; Khoi A. Phan; Chris A. Spence; Amy A. Winder; William A. Stanton; Eugene A. Delarosa; John Maltabes; Cecilia E. Philbin; Lloyd C. Litt; Anthony Vacca; Scott Pomeroy

Repair and printability of 193nm alternating aperture phase shift masks have been studied in detail in an effort to understand the overall production capability of these masks for wafer production at the 100nm node and below.

Archive | 2001

Methods of reducing proximity effects in lithographic processes

Christophe Pierrat; James Burdorf; William J. Baggenstoss; William A. Stanton

Archive | 1999

Method for designing and making photolithographic reticle, reticle, and photolithographic process

John R. C. Futrell; Christophe Pierrat; William A. Stanton

Archive | 1999

Method to eliminate side lobe printing of attenuated phase shift

William J. Baggenstoss; William A. Stanton

Archive | 2004

Optimized optical lithography illumination source for use during the manufacture of a semiconductor device

William A. Stanton; Jeffrey L. Mackey

Archive | 2004

Methods of forming patterned reticles

H. Daniel Dulman; William A. Stanton; John R. C. Futrell

Archive | 2004

Method and apparatus to increase throughput of processes using pulsed radiation sources

Vishnu K. Agarwal; William A. Stanton

Archive | 1999

Mask design utilizing dummy features

William A. Stanton; Vishnu K. Agarwal

Archive | 1997

Reduction of contact size utilizing formation of spacer material over resist pattern

Phillip G. Wald; Mark Fischer; William A. Stanton

Archive | 2010

Inverted variable resistance memory cell and method of making the same

William A. Stanton

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Fei Wang

Micron Technology

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William J. Baggenstoss

Micron Technology

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H. Daniel Dulman

Micron Technology

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John R. C. Futrell

Micron Technology

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Vishnu K. Agarwal

Micron Technology

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Christophe Pierrat

Bell Labs

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Gurtej S. Sandhu

Micron Technology

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Husayn Alvarez-Gomariz

Micron Technology

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Jeffrey L. Mackey

Micron Technology

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Christophe Pierrat

Bell Labs

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