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William Budge

Micron Technology

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Publication

Featured researches published by William Budge.

Archive | 2002

Low k interlevel dielectric layer fabrication methods

Weimin Li; Zhiping Yin; William Budge

Archive | 2005

Methods for filling high aspect ratio trenches in semiconductor layers

Jingyi Bai; Weimin Li; William Budge

Archive | 2004

Trench insulation structures including an oxide liner that is thinner along the walls of the trench than along the base

John Smythe; William Budge

Archive | 2002

Use of selective ozone teos oxide to create variable thickness layers and spacers

William Budge; Gurtej S. Sandhu; Chris W. Hill

Archive | 2007

Trench insulation structures and methods

John Smythe; William Budge

Archive | 2003

Use of linear injectors to deposit uniform selective ozone TEOS oxide film by pulsing reactants on and off

William Budge; Gurtej S. Sandhu; Chris W. Hill

Archive | 2004

Selectively deposited silicon oxide layers on a silicon substrate

William Budge; Gurtej S. Sandhu; Chris W. Hill

Archive | 2002

Protection in integrated circuits

Neal R. Rueger; William Budge; Weimin Li

Archive | 2005

Methods of filling gaps using high density plasma chemical vapor deposition

Neal R. Rueger; William Budge; Weimin Li; Gurtej S. Sandhu

Archive | 2007

Method of forming an isolation structure that includes forming a silicon layer at a base of the recess

John Smythe; William Budge

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Gurtej S. Sandhu

Micron Technology

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John Smythe

Micron Technology

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Weimin Li

Micron Technology

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Chris W. Hill

Micron Technology

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Neal R. Rueger

Micron Technology

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Jingyi Bai

Micron Technology

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Zhiping Yin

Micron Technology

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