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Dive into the research topics where Neal R. Rueger is active.

Publication


Featured researches published by Neal R. Rueger.


Archive | 2005

Multiple spacer steps for pitch multiplication

Sanket Sant; Gurtej S. Sandhu; Neal R. Rueger


Archive | 2006

Plasma processing apparatuses and methods

Neal R. Rueger


Archive | 2002

Methods of forming transistors

Gurtej S. Sandhu; John T. Moore; Neal R. Rueger


Archive | 2006

Inter-metal dielectric fill

Neal R. Rueger; Chris W. Hill; Zailong Bian; John Smythe


Archive | 2010

Devices comprising nanotubes for use as sensors and/or transducers, and related methods

Neal R. Rueger


Archive | 2005

Method and system for discretely controllable plasma processing

Neal R. Rueger; Gurtej S. Sandhu


Archive | 2010

Electron beam processing device and method using carbon nanotube emitter

Neal R. Rueger; Mark J. Williamson; Gurtej S. Sandhu


Archive | 2006

ELECTRON INDUCED CHEMICAL ETCHING FOR MATERIALS CHARACTERIZATION

Mark J. Williamson; Gurtej S. Sandhu; Justin R. Arrington; Neal R. Rueger


Archive | 2004

Systems and methods for depositing material onto microfeature workpieces

Neal R. Rueger; Joel A. Drewes


Archive | 2003

Deposition and chamber treatment methods

Weimin Li; Neal R. Rueger

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