Won-Pyo Hong

Data Application Plan in the Collaboration Hub System

It becomes more difficult for a company to cope with the volatilities in complex environment today. In this circumstance, KITECH (Korea Institute of Industrial Technology) is trying to establish the foundation of i-Manufacturing, a collaboration hub system, combining traditional molding industry with IT technology. In a collaboration system, it is essential to manage data efficiently which are produced and collected from various projects and manufacturing processes in molding business. This paper would present a framework to implement DQMS (data quality management system), data warehouse and data mining through situational analysis of current systems. In addition, this paper would suggest a framework of implementing EIS (Executive Information System) to support decision making of the management.

FIB-Sputtering Characteristic of Mold Material and Nano Grid Pattern Fabrication

Recently, FIB-Sputtering process has been applied to many micro-manufacturing fields such as semi-conductor industries, display industries and IT industries etc. because it is available to fabricate the micro 3D shape structure directly and more effectively than other machining processes. However, currently FIB is not applied in the fabrication of this micro mold because of some problems such as redeposition and charging effect relating to shape accuracy and productivity. Furthermore, the prediction of the material removal rate is difficult for micro structure fabrication. In this paper, we studied the FIB-Sputtering rate according to mold materials. As well, surface roughness characteristics were analyzed for micro and nano mold fabrication. Si wafer, G.C (glassy carbon), STAVAX, and DLC that have been normally considered as good micro or nano mold materials were used in this study. And also we have known the pattern by pattern procedure has more good fib-sputtering shape than layer by layer procedure.

The Analysis of Focused Ion Beam Processing Characteristics for Micro Mold Fabrication

FIB equipment has the ability to perform etching and chemical vapor deposition simultaneously. It is very advantageously used to fabricate micro structure components having 3D shape because it has a minimum beam size of Φ 10nm and smaller. Currently, FIB technology has been studied the research fields relating to two problems such as low accuracy and low productivity due to redeposition and a charging effect. This paper focuses on applying FIB technology to the field of micro mold fabrication and repair. As such, the simple micro pattern fabrication techniques and the experimental characteristics are studied on FIB-CVD according to ion beam condition and scanning area. We have encountered some remarks that the result of the experiments according to beam current of 8 pA, shows superior CVD yield. But the result of 1318 pA shows the pattern etched off. Furthermore, we also analyzed the scanning area effect for FIB-CVD yield and suggest the maximum yield condition of the chemical vapor deposition for micro part fabrication.

Optimization of the Chemical Vapor Deposition Induced Focused Ion Beam

This paper carried out some experimentation and verification of the chemical vapor deposition induced ion beam and sputtering using the SMI8800 manufactured by SEIKO. FIB-CVD is very useful tools to repair the mask or IC with sub-micrometer precision. However it need to be much studied in some fields such as FIB-CVD mechanism and the characteristics of pattern accuracy and yield of CVD according to many parameters related to ion beam, beam scanning methods and type of specimen etc. Therefore the verification on FIB-CVD characteristic such as accuracy and yield according to scanning area and scanning time is carried out in this study. And it suggests the optimization parameters, various mechanisms of the chemical vapor deposition induced ion beam and sputtering effect for simple pattern.

Dual Servo Mechanism for High Precision Positioning with VCM and PZT Actuator

Abstract This paper presents a high precision positioning mechanism design with dual actuator. In the fields of micro positioning, micromanipulation and micro test instrument, the required motion precision is continuously increasing. Dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of a flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.